Thin Solid Films
 2023
DOI: 10.1016/j.tsf.2023.140067
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Effect of copper content on the microstructure, morphology, and optical properties of ZrSiN coatings deposited using pulsed-direct current reactive magnetron sputtering

H.S. Vanegas,
F.F. Vallejo,
S. Calderon
et al.
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