Effect of crystal orientation on the nanoindentation deformation behavior of TiN coating based on molecular dynamics

Liu, Guosong; Yang, Shuzhen; Dong, Liguang; Zhang, Jingran; Zheng, Zixian; Liu, Jianhe

doi:10.1016/j.surfcoat.2023.129721

Cited by 12 publications

(7 citation statements)

References 64 publications

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“…The resulting depth h for these coatings was, respectively, the following: 5 ± 1, 16 ± 5, and 7 ± 1 nm, and the specific volumetric wear ω was: (0.85 ± 0. The influence of the mechanical properties on the tribological properties (reduction of CoF and specific volumetric wears) of TiN coatings was shown in [11,24], and the influence of topography and surface roughness was shown in [10]. In the second group, coatings deposited at 1 and 1.5 sccm have small changes in CoF values relative the average values of 0.086 and 0.184, respectively (Figures 10b and 12f,g) throughout the entire test distance.…”

Section: Resultsmentioning

confidence: 93%

“…The influence of the mechanical properties on the tribological properties (reduction of CoF and specific volumetric wears) of TiN coatings was shown in [ 11 , 24 ], and the influence of topography and surface roughness was shown in [ 10 ].…”

Section: Resultsmentioning

confidence: 99%

“…Thus, TiN coatings are widely used in medical applications [ 5 , 6 ] as well as aircraft and shipbuilding [ 7 ] to increase the wear resistance of cutting and processing tools [ 8 , 9 ]. For such applications, a large number of works on the characterization of TiN coatings deposited by various methods was fulfilled [ 10 , 11 , 12 , 13 , 14 ]. And to study the structure and properties, standard macromethods and equipment were used [ 9 , 15 , 16 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

“…Adapting MEMS coatings requires studying the behavior and changing surface properties at the micro- and nanoscales [ 1 ]. The use of nanoindentation and nanoscratch testing to determine the properties of TiN coatings is a promising direction for studying mechanical and microtribological properties [ 1 , 10 , 13 , 26 , 27 ]. For example, using nanoindentation and mathematical modeling, the influence of crystallographic orientation on the microhardness of coatings was evaluated [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

“…The use of nanoindentation and nanoscratch testing to determine the properties of TiN coatings is a promising direction for studying mechanical and microtribological properties [ 1 , 10 , 13 , 26 , 27 ]. For example, using nanoindentation and mathematical modeling, the influence of crystallographic orientation on the microhardness of coatings was evaluated [ 10 ]. In [ 27 ], the wear-resistant properties of homogeneous (HM) and functionally graded (FG) TiN thin films were studied using nanoscratch testing.…”

Section: Introductionmentioning

confidence: 99%

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The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings

Lapitskaya,

Nikolaev,

Khabarava

et al. 2023

Materials

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Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group—TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group—TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group—TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).

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Section: Resultsmentioning

confidence: 93%