“…The result obtained reveals that the film's adhesion strength is good, and the hardness of the films reached a 2493HV value, 6.96 mN nanoindentation peak force loading, and 47.92% elastic recovery. Figures 3 show the summary of the comparison of hardness properties results of various sputtered HEAs thin films coatings from the literature (Garah et al, 2022;Liang et al, 2020;Yang et al, 2021;Huang et al, 2022;Khan et al, 2021;Kretschmer et al, 2021;Muftah et al, 2021a;Sha et al, 2020a;Xing et al, 2019;Xu et al, 2021;Medina et al, 2021), and Figure 4 shows the summary of the comparison of different elastic modulus of sputtered HEAs thin films coatings from the literature (Alvi et al, 2020b;Cai et al, 2021;Feng et al, 2013;Zhao et al, 2013;Kim, Park, Lim, et al, 2019;Lv et al, 2016;Ren et al, 2011;Tan et al, 2021;W. Liao et al, 2017b).…”