2004
DOI: 10.1016/j.ssc.2004.01.041
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Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Abstract: The dependence of YBCO thin film properties on the deposition conditions was studied for different substrates. The deposition conditions were optimized for the epitaxial growth of high quality YBCO thin films of 1500 Å thickness onto single crystal (100-oriented) SrTiO 3 (STO), MgO and LaAlO 3 (LAO) substrates by DC Inverted Cylindrical Magnetron Sputtering (ICMS). The samples were investigated in detail by means of X-ray diffraction analysis (XRD), EDX, AFM, r -T; magnetic susceptibility and current -voltage … Show more

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Cited by 6 publications
(5 citation statements)
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“…This indicates a good J C uniformity over the whole area of the YBCO films. These results are quite impressive when compared with those previously reported [13][14][15]. The superconducting transition temperatures of the films were measured by the standard four-probe method.…”
Section: Resultssupporting
confidence: 72%
“…This indicates a good J C uniformity over the whole area of the YBCO films. These results are quite impressive when compared with those previously reported [13][14][15]. The superconducting transition temperatures of the films were measured by the standard four-probe method.…”
Section: Resultssupporting
confidence: 72%
“…The thin films were deposited under the fixed deposition conditions such as; the partial pressures of Ar and O 2 gases of 0.5 mbar and 0.1 mbar, respectively, plasma power of 45 W, and substrate temperature of 800°C. The resulting deposition rate was about 1.3 nm/min [23]. We obtained c-axis epitaxial YBCO thin films using the above optimum deposition parameters.…”
Section: Samples and Experimental Setupmentioning
confidence: 98%
“…After the deposition, the thin films were first measured as resistance versus temperature in order to characterize their superconducting transition temperatures and transition widths (Table 1). Superconducting transition temperatures, T c , of the thin film samples were found as typically 88-89 K with transition widths of about 0.5 K from T c-zero to T c-onset as presented somewhere else [19]. However the transition widths of resistance versus temperature characteristics of the 4 m patterned films were about ∼1.5 K which shows a slight degradation in the film quality which can be associated with the wet etching process as shown in Fig.…”
Section: Ybco Thin Filmmentioning
confidence: 90%
“…Most of them are related to the structural properties of YBCO thin films and junctions on them. Therefore, the research on the optimization of thin film structure is vital [18,19]. Critical current density of YBCO thin films depends on the amount of strong pinning sites inside the film structure [20].…”
Section: Introductionmentioning
confidence: 99%