2008
DOI: 10.3740/mrsk.2008.18.8.406
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Effect of Deposition Parameters on the Properties of Pyrolytic Carbon Deposited by Fluidized-Bed Chemical Vapor Deposition

Abstract: The properties of pyrolytic carbon (PyC) deposited from C particles in a fluidized bed reactor were studied by adjusting the deposition temperature, reactant concentration, and the total gas flow rate. The effect of the deposition parameters on the properties of PyC was investigated by analyzing the microstructure and density change. The density could be varied from 1.0 g/cm 3 to 2.2 g/cm 3 by controlling the deposition parameters. The density decreased and the deposition rate increased as the deposition tempe… Show more

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“…Impregnation processes with TEDA (5 wt%) were made in samples S650/60 and C900/60 following the sublimation process described in US Patent 5792720 23. This process uses TEDA (99% purity, Sigma–Aldrich) placed into a vapor generating vessel, heated up to 120°C, and the vapor generated conducted by an airtight stainless steel reactor to the AC bed.…”
Section: Methodsmentioning
confidence: 99%
“…Impregnation processes with TEDA (5 wt%) were made in samples S650/60 and C900/60 following the sublimation process described in US Patent 5792720 23. This process uses TEDA (99% purity, Sigma–Aldrich) placed into a vapor generating vessel, heated up to 120°C, and the vapor generated conducted by an airtight stainless steel reactor to the AC bed.…”
Section: Methodsmentioning
confidence: 99%