Effect of design parameters on thin film bulk acoustic resonator performance

Choi, Namkyoung; Kim, K. B.; Kim, Y. I.; Kim, M. S.

doi:10.1007/s10832-014-9896-2

Cited by 7 publications

(2 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The second FBAR structure is the solidly mounted resonator (SMR) [264] which is made by separating the acoustic resonant wave by using an acoustic Bragg reflector which is consisted of several layers of certain types of materials usually called the Bragg mirror FBAR resonator [265][266][267]. Both the air cavity and Bragg mirror layer methods have been demonstrated to be effective reflectors and the acoustic waves have been formed between two electrodes known as metallic top and bottom electrodes.…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

View full text Add to dashboard Cite

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

show abstract

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

View full text Add to dashboard Cite

show abstract

“…To this end, a new type of piezoelectric material AlScN doped with scandium up to 40% has been developed, which showed much improved effective electromechanical coupling coefficient by 300 400% (Akiyama et al 2009;Wang et al 2014b) and has been used to fabricate FBARs with coupling coefficient of the device up to 3.8% achieved (Pashchenko et al 2016). Additionally, the thickness of piezoelectric films can be optimised depending on the electrode materials has been reported (Choi et al 2014).…”

Section: Optimisation Of Fbarsmentioning

confidence: 99%

Film bulk acoustic resonators (FBARs) as biosensors: A review

Zhang

Luo

Flewitt

et al. 2018

Biosensors and Bioelectronics

View full text Add to dashboard Cite

Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications. In the past decade, film bulk acoustic resonators (FBARs) have been developed as biosensors because of their high resonant frequency and small base mass (hence greater sensitivity), lower cost, label-free capability and small size. This paper reviews the piezoelectric materials used for FBARs, the optimisation of device structures, and their applications as biosensors in a wide range of biological applications such as the detection of antigens, DNAs and small biomolecules. Their integration with microfluidic devices and high-throughput detection are also discussed.

show abstract