Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering

Li, Zhao; Shi, Liang; Wang, Ji; Yan, Jun; Chen, Yunlin; Zheng, Yanqing

doi:10.1016/j.mssp.2019.104901

Cited by 5 publications

(3 citation statements)

References 32 publications

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“…In 2001, Lansiaux et al [39] were able to grow thick c-axis monocrystalline LN films on Al 2 O 3 substrates using a multi-step sputtering process from a LN target with added excess lithium of 10-20%, showing optical losses as low as 1.2 dB/cm [38]. Today, the sputtering of LN continues in research regarding doping [12], integrating and forming heterojunctions with silicon [40], tuning band gap [14], etc.…”

Section: Sputteringmentioning

confidence: 99%

“…Promising work on direct etching of LN to fabricate compact optical devices with optical propagation losses as low as 0.027 dB/cm has been shown in a 250 nm thin LN slab, achieved by a dry etch process to pattern a 600 nm smart-cut film [10,11]. Thus, high-quality epitaxial thin film LN is desirable for smaller devices with lower power consumption; lower optical losses; tighter wave confinement; integrated devices; and engineered material advances, such as doping [12,13] or strain manipulation [14], analogous to compound semiconductor electronics technology.…”

Section: Introductionmentioning

confidence: 99%

“…Of particular interest are the elimination of rotational domains, as this has been shown to strongly effect optical quality [15,16]. There are various epitaxial methods that have successfully grown LN, including liquid phase epitaxy (LPE) [17][18][19][20][21][22][23][24][25][26], sputtering [12,14,[27][28][29][30][31][32][33][34][35][36][37][38][39][40], chemical vapor deposition (CVD) [41][42][43][44][45][46][47][48][49][50], pulsed laser deposition (PLD) [13,[51][52][53][54][55][56][57][58][59][60]…”

Section: Introductionmentioning

confidence: 99%

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Epitaxy of LiNbO3: Historical Challenges and Recent Success

2021

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High-quality epitaxial growth of thin film lithium niobate (LiNbO3) is highly desirable for optical and acoustic device applications. Despite decades of research, current state-of-the-art epitaxial techniques are limited by either the material quality or growth rates needed for practical devices. In this paper, we provide a short summary of the primary challenges of lithium niobate epitaxy followed by a brief historical review of lithium niobate epitaxy for prevalent epitaxial techniques. Available figures of merit for crystalline quality and optical transmission losses are given for each growth method. The highest crystalline quality lithium niobate thin film was recently grown by halide-based molecular beam epitaxy and is comparable to bulk lithium niobate crystals. However, these high-quality crystals are grown at slow rates that limit many practical applications. Given the many challenges that lithium niobate epitaxy imposes and the wide variety of methods that have unsuccessfully attempted to surmount these barriers, new approaches to lithium niobate epitaxy are required to meet the need for simultaneously high crystalline quality and sufficient thickness for devices not currently practical by existing techniques.

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Section: Sputteringmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Epitaxy of LiNbO3: Historical Challenges and Recent Success

2021

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Piezoelectric Energy Harvesting: From Fundamentals to Advanced Applications

Bhatnagar,

Yadav,

Kumar

et al. 2024

Energy Tech

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Piezoelectric energy harvesting (PEH) has surfaced as an innovative technology for supplying power to low‐power electronic devices by converting mechanical energy into electrical energy. This technology utilizes the piezoelectric effect, in which specific materials produce an electric charge when they experience mechanical stress. Piezoelectric materials can be categorized into three main types: single crystal, composite, and polymeric. Single‐crystal materials exhibit elevated piezoelectric coefficients and stability; however, they tend to be costly and fragile. Composite materials integrate piezoelectric ceramics with polymer matrices, enhancing flexibility and lowering costs. Polymeric materials exhibit lightweight, flexible, and biocompatibility characteristics, rendering them ideal for wearable and implantable applications. Although PEH presents considerable promise, it is essential to tackle challenges, including low power output, material constraints, and environmental influences. Future investigations will focus on creating innovative materials that exhibit improved piezoelectric characteristics, refining device architecture for optimal energy conversion, and incorporating piezoelectric harvesting technology into intelligent systems. By addressing these challenges and investigating creative solutions, PEH can significantly advance sustainable and self‐powered electronic devices.

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