Effect of driving frequency on dust particle dynamics in radiofrequency capacitive argon discharge

Abstract

This paper investigates the influence of the driving frequency on the dynamics of a single dust particle in argon radiofrequency discharge. A one-dimensional fluid model is presented and solved in the entire inter-electrode domain using the finite difference method. In order to solve the particle equation of motion, the coefficients describing the amplification and the damping of the dust particle oscillations are analytically calculated around the equilibrium position, these coefficients allow us to find the relation between the plasma and dust parameters. The results obtained cover the discharge characteristics, the charge and the dynamics of the dust particle. It has been found that the driving frequency has a significant effect on not only the discharge properties but also on the damped oscillatory motion and the equilibrium position of the dust particle. Hence, these oscillations become closer to the electrodes with increasing driving frequency whereas the dust equilibrium position becomes relatively farther from the powered electrode when the dust size decreases.

Dust particle charging process in a radio frequency sheath of plasma containing kappa distribution electrons

“…2010; El Kaouini et al. 2014; Missaoui, El Kaouini & Chatei 2021). However, the electron distribution in plasma discharges is not perfectly Maxwellian if the system of particles is in non-thermal equilibrium.…”

“…For the dust particle charging process in an RF sheath, where quasi-neutrality breaks down and the large electric field gradients vary with time, Nitter introduced a model in which the electrons obey a Maxwellian distribution . Later, other authors studied the process in greater detail and addressed the issue of the determination of the dust particle charging process (Hou et al 2003;Bacharis et al 2010;El Kaouini et al 2014;Missaoui, El Kaouini & Chatei 2021). However, the electron distribution in plasma discharges is not perfectly Maxwellian if the system of particles is in non-thermal equilibrium.…”