2019
DOI: 10.1016/j.matpr.2019.06.353
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Effect of Etchant on SOI Wafer Surface Roughness for APTES Silanization

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Cited by 3 publications
(5 citation statements)
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“…This can lead to the agglomeration and poor dispersion of ceramic filler particles, resulting in the formation of voids and interfacial defects [28]. Coupling agents used for silanization include [28][29][30][31]: (3-aminopropyl)triethoxysilane (APTES), trimethylchlorosilane (TMCS), and (3-mercaptopropyl) trimethoxysilane (MPTMS). Of these, only APTES, whose organic chain contains a functional group capable of forming H-bonds with polymers, provides composites with better thermo-mechanical stability, highlighting the importance of creating stronger interfacial bonds versus a simple surface energy reduction [26].…”
Section: Introductionmentioning
confidence: 99%
“…This can lead to the agglomeration and poor dispersion of ceramic filler particles, resulting in the formation of voids and interfacial defects [28]. Coupling agents used for silanization include [28][29][30][31]: (3-aminopropyl)triethoxysilane (APTES), trimethylchlorosilane (TMCS), and (3-mercaptopropyl) trimethoxysilane (MPTMS). Of these, only APTES, whose organic chain contains a functional group capable of forming H-bonds with polymers, provides composites with better thermo-mechanical stability, highlighting the importance of creating stronger interfacial bonds versus a simple surface energy reduction [26].…”
Section: Introductionmentioning
confidence: 99%
“…The main problem encountered with polymer-ceramic composites is ensuring adequate adhesion of ceramic fillers to the polymer matrix [12,13]. One possible method to ensure this is to modify the ceramic surface by introducing functional groups that improve adhesion, e.g., -SH, -CN-COOH, -NH 2 , and -SiH 4 [14]. Due to the simplicity of applications and the possibility to obtain good adhesion between ceramics and polymers, silanization has received much attention [14][15][16][17].…”
Section: Introductionmentioning
confidence: 99%
“…One possible method to ensure this is to modify the ceramic surface by introducing functional groups that improve adhesion, e.g., -SH, -CN-COOH, -NH 2 , and -SiH 4 [14]. Due to the simplicity of applications and the possibility to obtain good adhesion between ceramics and polymers, silanization has received much attention [14][15][16][17]. Silanization is a proven way to introduce silane coupling agents that can be used to improve the surface properties and introduce reactive functional groups on ceramic surfaces [18,19].…”
Section: Introductionmentioning
confidence: 99%
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“…Alias et al (2018) also investigated the effect of APTES silanization on the surface roughness of silicon-on-insulator (SOI) wafers. 27 Their work aimed to explore the surface roughness due to the good hydrophilic effect of APTES on SOI wafers. Gold nanoparticles (AuNPs) attached to the surface of SOI wafers were used to confirm the presence of APTES.…”
Section: Introductionmentioning
confidence: 99%