2020
DOI: 10.1016/j.apsusc.2020.147463
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Effect of etching time in hydrofluoric acid on the structure and morphology of n-type porous silicon

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Cited by 11 publications
(6 citation statements)
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“…One can deduce that the dissolution of SiO 2 in the electrolyte solution is less pronounced in the absence of surfactant which is consistent with the discussion above. In accordance with the deconvolution of Si peaks, core level O 1s (532.8 eV) on all three spectra (not shown here) also confirm the presence of silicon oxide species [23,27]. Although these anodized surfaces slightly differ in term of SiO 2 and H y SiO x portions, the existence of these completely and partially oxidised species affirms the involvement of anodic oxidation reaction in PSi formation.…”
Section: Chemical Composition Of Anodized Psi Layerssupporting
confidence: 87%
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“…One can deduce that the dissolution of SiO 2 in the electrolyte solution is less pronounced in the absence of surfactant which is consistent with the discussion above. In accordance with the deconvolution of Si peaks, core level O 1s (532.8 eV) on all three spectra (not shown here) also confirm the presence of silicon oxide species [23,27]. Although these anodized surfaces slightly differ in term of SiO 2 and H y SiO x portions, the existence of these completely and partially oxidised species affirms the involvement of anodic oxidation reaction in PSi formation.…”
Section: Chemical Composition Of Anodized Psi Layerssupporting
confidence: 87%
“…The newer peaks appearing at 101 eV hint the presence of intermediate state of oxide (SiO x ). In addition to the presence of high valance silicon dioxide (SiO 2 ), anodized PSi layers may also contain low valance silicon mono-oxide (Si-O) as well as H y SiO x and SiF x H y complexes [23,27]. In our case, since fluorine is not detected, the presence of SiF x H y complexes is ruled out.…”
Section: Chemical Composition Of Anodized Psi Layersmentioning
confidence: 80%
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“…Specifically, since the band gap of a-Si is much larger than that of crystalline Si, more energy should be required to drive electron migration in the a-Si layer, which can interfere the redox reaction on scratched areas, thereby changing the topography of prepared metallic structures. Notably, the a-Si layer can be selectively dissolved by HF solution Figure a showed Raman spectra collected from a scratch before and after being etched by HF solution for 60 min.…”
Section: Resultsmentioning
confidence: 99%
“…Notably, the a-Si layer can be selectively dissolved by HF solution. 42 Figure 2a showed Raman spectra collected from a scratch before and after being etched by HF solution for 60 min. For untreated scratches, besides Raman characteristic peak for pristine Si−I (520 cm −1 ), other peaks (150 cm −1 , 300 cm −1 , and 470 cm −1 ) can also be noticed, while only one peak at 520 cm −1 appeared on HF-etched scratches, demonstrating that the a-Si layer was completely removed from the scratched area, which was confirmed by TEM characterization (Figure S5b).…”
Section: Orientational Deposition Mechanism Figure S5mentioning
confidence: 99%