Effect of Femtosecond Laser Processing Parameters on the Ablation Microgrooves of RB-SiC Composites

Abstract

Because of the high hardness, brittleness, and anisotropy of reaction-bonded silicon carbide composites (RB-SiC), it is challenging to process high-quality textures on their surfaces. With the advantages of high processing accuracy and low processing damage, femtosecond laser processing is the preferred technology for the precision processing of difficult-to-process materials. The present work used a femtosecond laser with a linear scanning path and a spot diameter of 18 µm to process microgrooves on RB-SiC. The influence of different processing parameters on the microgroove profile, dimensions, and ablation rate (AR) was investigated. The ablation width Wa and average ablation depth Da of microgrooves were evaluated, and the various patterns of varying processing parameters were obtained. A model for Wa prediction was developed based on the laser fluence within the finite length (FL). As a result, the experimental values were distributed near the prediction curve with a maximum error of 20.4%, showing an upward trend of gradually decreasing increments. For a single pass, the AR value was mainly determined by the laser energy, which could reach the scale of 106 μm3/s when the laser energy was greater than 50 μJ. For multiple passes, the AR value decreased as the number of passes increased and it finally stabilized. The above research will provide theoretical and experimental support for the high-quality and efficient processing of RB-SiC surface textures.

New aspects of femtosecond laser ablation of Si in water: a material perspective

“…Ultrafast laser ablation is a well-established and versatile technique to fabricate nanoparticles and nanostructures with superior precision and control for various technological applications [14][15][16][17]. Hence, the interaction of femtosecond laser pulses with different materials has attracted significant attention in view of its characteristic features of low heat-affected zones, minimal collateral damage, and precise micromachining [18][19][20]. Since its discovery, the laser ablation process has been explored in many fields pioneering nanomaterials for applied sciences [21][22][23][24][25][26].…”