Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

Han, Guifang; Ryu, Jungho; Yoon, Woon‐Ha; Choi, Jong‐Jin; Hahn, Byung‐Dong; Park, Dong-Soo

doi:10.1111/j.1551-2916.2010.04276.x

Cited by 38 publications

(18 citation statements)

References 30 publications

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“…In order to overcome this problem, our research group has studied the aerosol deposition method [AD]; based on its room-temperature process [13,14], it can easily form composites in the submicron range using different kinds of materials, such as ceramics, polymers, or metals by simply mixing their starting powders [15-18]. In this study, we attempted to fabricate Al 2 O 3 -polyimide composite thick films with high Al 2 O 3 contents of more than 60 vol.% and studied the characteristics of these composite thick films in relation to their contents of Al 2 O 3 .…”

Section: Introductionmentioning

confidence: 99%

High loading of nanostructured ceramics in polymer composite thick films by aerosol deposition

Nam

2012

Nanoscale Res Lett

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Low temperature fabrication of Al2O3-polyimide composite substrates was carried out by an aerosol deposition process using a mixture of Al2O3 and polyimide starting powders. The microstructures and dielectric properties of the composite thick films in relation to their Al2O3 contents were characterized by X-ray diffraction analysis. As a result, the crystallite size of α-Al2O3 calculated from Scherrer's formula was increased from 26 to 52 nm as the polyimide ratio in the starting powders increased from 4 to 12 vol.% due to the crushing of the Al2O3 powder being reduced by the shock-absorbing effect of the polyimide powder. The Al2O3-polyimide composite thick films showed a high loss tangent with a large frequency dependence when a mixed powder of 12 vol.% polyimide was used due to the nonuniform microstructure with a rough surface. The Al2O3-polyimide composite thick films showed uniform composite structures with a low loss tangent of less than 0.01 at 1 MHz and a high Al2O3 content of more than 75 vol.% when a mixed powder of 8 vol.% polyimide was used. Moreover, the Al2O3-polyimide composite thick films had extremely high Al2O3 contents of 95 vol.% and showed a dense microstructure close to that of the Al2O3 thick films when a mixed powder of 4 vol.% polyimide was used.

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Section: Introductionmentioning

confidence: 99%

High loading of nanostructured ceramics in polymer composite thick films by aerosol deposition

Nam

2012

Nanoscale Res Lett

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“…The process has unique advantages compared to other thin/thick film deposition process such as high deposition rate (over several tens μm/min depending on the deposition area), low processing temperature, composition control, high adhesion strength between substrate and film as well as micropatterning of ceramic thick films during deposition (Zhou et al 2011). Due to its low temperature processing, low sinterability ceramic thick films such as KNN based lead-free piezoelectrics and PbTiO 3 ceramics with full density can be deposited on various types of substrates (Han et al 2011b;Ryu et al 2007Ryu et al , 2014Wang et al 2008). Figure 18 shows ferroelectric/piezoelectric property modulation of AD-PZT film according to the variation of residual stress level (Han et al 2011a).…”

Section: Piezoelectric Thick Films By Powder/ Granule Spray In Vacuummentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya

Song

Zhou

et al. 2017

Energy Harvesting and Systems

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341

144

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Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

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“…Screen printing technology was investigated to fabricate PZT thick film where the PZT paste was printed on the screen stencil for the formation of patterned PZT thick film [5]. Aerosol deposition (AD) has been studied to fabricate PZT thick films by consolidation of submicron-ceramic particles on substrate at room temperature [6]. Composite film (ComFi) technique utilizes the combination of PZT powder and sol-gel processing to produce PZT thick film [7,8], which was introduced to fabricate PZT thick film with the thickness of tens of micrometres.…”

Section: Introductionmentioning

confidence: 99%

“…Han et al produced PZT thick films on silicon substrate with coated platinum successfully using aerosol deposition and studied the effects of film thickness [6] and top electrode diameter [18] on the piezoelectric properties. Kerkache et al [19] investigated the dielectric and ferroelectric properties of the RF sputtered ITO/PZT/Pt structure on SiO2/Si substrates.…”

Section: Introductionmentioning

confidence: 99%