Effect of flux rate on the growth of AlN films on sapphire by MNVPE

Song, Yuxuan; Zhang, Hui; Lin, Xiangyu; Xie, Xinjian; Li, Chaoyuan; Bian, Lifeng; Chen, Guifeng

doi:10.1016/j.mssp.2023.107843

Materials Science in Semiconductor Processing

2023

DOI: 10.1016/j.mssp.2023.107843

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Effect of flux rate on the growth of AlN films on sapphire by MNVPE

Yuxuan Song,

Hui Zhang,

Xiangyu Lin

et al.

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Effect of flux rate on the growth of AlN films on sapphire by MNVPE

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References 27 publications

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