2020
DOI: 10.1016/j.tsf.2020.138185
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Effect of gas atmospheres on degradation of MgO thin film magnetic tunneling junctions by deionized water

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Cited by 2 publications
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“…Then, MgO (30 nm) and Al 2 O 3 (20 nm) were deposited by RF magnetron sputtering at room temperature. The Al 2 O 3 encapsulation layer prevents a degradation of the MgO layer by water molecules due to a hygroscopic nature of the MgO layer. , Figure b shows a scanning electron microscope (SEM) image of the fabricated β-Ga 2 O 3 /MgO phototransistor. We also fabricated a reference β-Ga 2 O 3 phototransistor with nearly identical dimensions and channel thickness to investigate the effects of the MgO layer.…”
Section: Resultsmentioning
confidence: 99%
“…Then, MgO (30 nm) and Al 2 O 3 (20 nm) were deposited by RF magnetron sputtering at room temperature. The Al 2 O 3 encapsulation layer prevents a degradation of the MgO layer by water molecules due to a hygroscopic nature of the MgO layer. , Figure b shows a scanning electron microscope (SEM) image of the fabricated β-Ga 2 O 3 /MgO phototransistor. We also fabricated a reference β-Ga 2 O 3 phototransistor with nearly identical dimensions and channel thickness to investigate the effects of the MgO layer.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, the oxygen nucleus will strengthen the bound of extranuclear electron, and the binding energy increases [ 59 , 60 ]. Figure 10 a–c show the content of O1 (lattice oxygen) and O2 (oxygen of vacancy and hydroxide) change with temperature from 300 °C to 500 °C under 1.0 M. Using data from previous research [ 23 , 61 , 62 ], the three kinds of peak positions can be determined as ~530 eV, ~531 eV and ~532 eV, respectively. The peak position of O2 is closer to oxygen vacancy when the annealing temperature is 300 °C and 500 °C.…”
Section: Resultsmentioning
confidence: 99%