Deep-ultraviolet
(DUV) photodetectors based on wide-band-gap semiconductors
have attracted significant interest across a wide range of applications
in the industrial, biological, environmental, and military fields
due to their solar-blind nature. As one of the most promising wide-band-gap
materials, β-Ga2O3 provides great application
potential over detection wavelengths ranging from 230 to 280 nm owing
to its superior optoelectronic performance, stability, and compatibility
with conventional fabrication techniques. Although various innovative
approaches and device configurations have been applied to achieve
highly performing β-Ga2O3 DUV photodetectors,
the highest demonstrated responsivity of the β-Ga2O3 photodetectors has only been around 105 A/W.
Here, we demonstrate a β-Ga2O3 phototransistor
with an ultrahigh responsivity of 2.4 × 107 A/W and
a specific detectivity of 1.7 × 1015 Jones, achieved
by engineering a photogating effect. A β-Ga2O3/MgO heterostructure with an Al2O3 encapsulation
layer is employed not only to reduce photogenerated electron/hole
recombination but also to suppress the photoconducting effects at
the back-channel surface of the β-Ga2O3 phototransistor via a defect-assisted charge transfer mechanism.
The measured photoresponsivity is almost 2 orders of magnitude higher
than the highest previously reported value in a β-Ga2O3-based photodetector, to the best of our knowledge.
We believe that the demonstrated β-Ga2O3/MgO heterostructure configuration, combined with its facile fabrication
method, will pave the way for the development of ultrasensitive DUV
photodetectors utilizing oxide-based wide-band-gap materials.