The in-plane and cross-plane transport properties of nanocrystalline bismuth telluride (Bi 2 Te 3 ) thin lms were evaluated to analyze their anisotropic behavior. Bi 2 Te 3 thin lms were prepared via radio frequency (RF) magnetron sputtering, followed by a subsequent treatment of thermal annealing and homogeneous electron beam (EB) irradiation at various EB doses. The crystallographic properties of the thin lms were determined by X-ray diffraction (XRD) analysis. It was determined that the crystal orientation (Lotgering factor; F value) of Bi 2 Te 3 thin lms can be controlled by homogeneous EB irradiation treatments, without resulting in crystal growth. The electrical conductivity and Seebeck coefcient were measured in the in-plane direction of the lms, and the thermal conductivity was measured in the cross-plane direction using the 3ω method. The anisotropic analysis was performed by combining the F value of the thin lms with a simple model based on the transport properties of the basal and lateral planes of single-and poly-crystal Bi 2 Te 3 . The electrical and thermal conductivities of the in-plane and cross-plane directions of the EB-irradiated thin lms clearly differed; however, there was no signi cant difference between the Seebeck coef cient values of the two planes. Finally, we determined that the gure of merit, ZT, was enhanced by the homogeneous EB irradiation treatment, and the inplane ZT value was 25% greater than that of the cross-plane direction.