Effect of Grinding Offset and Radius of Curvature on Coupling Efficiency of Aspherical Microlens for Coupling High-Power Laser to Fiber

Huang, Yi-Chung; Hsieh, Wen-Hsuan; Wang, Lijin; Sheen, Maw-Tyan; Hsu, Yi‐Cheng; Liu, Yu-Da; Lin, Yong-Shian; Peng, Haoping; Tsai, Ying-Chien; Cheng, Wood-Hi

doi:10.1364/cleo_si.2012.cth1g.8

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2014

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“…The MLA has the advantages of ultra-thin thickness and low weight that can be down to several micrometers and easily integrated into an optical system. There are many applications of MLAs, such as Shack-Hartmann wavefront sensors [1], integral 3D imaging systems [2], optical communication [3], fiber and detector coupling [4], LED and OLED light extracting [5][6][7][8], laser beam homogenization and shaping [9]. A number of methods have been developed to fabricate MLAs in recent years [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Micro-lens array fabricated by laser interference lithography

Zhang

Wang

2014

2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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Micro-lens array (MLA) is a useful optic component. In this paper, we present a method to fabricate the MLA by three-beam laser interference lithography (LIL). Large area MLAs were obtained on photoresist. The MLA feature size was determined by controlling the incident angle of laser beams in LIL. The curvature of MLA was modified through the control of the post bake temperature and time or exposure dosage in LIL.It is convenient to adjust the size of the MLA in the laser interference lithography system. This method has the advantage of large area fabrication.

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