Effect of growth and electrical properties of TiOx films on microbolometer design

Yadav, Ishwar Chandra; Jain, Satbir; Lamba, Subhalakshmi; Tomar, Monika; Gupta, Shrish C.; Gupta, Vinay; Jain, Kapil; Dutta, Shankar; Chatterjee, Ratnamala

doi:10.1007/s10854-020-03223-y

Cited by 10 publications

(5 citation statements)

References 33 publications

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“…As verified by STEM and atomic force microscopy (AFM) (fig. S1A), the WO X oxidized from monolayer WSe 2 showed a uniform thickness of 1.5 to 2 nm despite slight variation resulted from the process-induced deformation or nonstoichiometric/inhomogeneous oxidation (26). Even after oxidation, WO X maintains an atomically flat surface with a roughness of 60 pm, comparable to the smoothness of WSe 2 (fig.…”

Section: Monolithic Bandgap Engineering Of Wse 2 For Mqwsmentioning

confidence: 91%

Atomic–layer–confined multiple quantum wells enabled by monolithic bandgap engineering of transition metal dichalcogenides

Kim

Kang

et al. 2021

Sci. Adv.

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Quantum wells (QWs), enabling effective exciton confinement and strong light-matter interaction, form an essential building block for quantum optoelectronics. For two-dimensional (2D) semiconductors, however, constructing the QWs is still challenging because suitable materials and fabrication techniques are lacking for bandgap engineering and indirect bandgap transitions occur at the multilayer. Here, we demonstrate an unexplored approach to fabricate atomic–layer–confined multiple QWs (MQWs) via monolithic bandgap engineering of transition metal dichalcogenides and van der Waals stacking. The WOX/WSe2 hetero-bilayer formed by monolithic oxidation of the WSe2 bilayer exhibited the type I band alignment, facilitating as a building block for MQWs. A superlinear enhancement of photoluminescence with increasing the number of QWs was achieved. Furthermore, quantum-confined radiative recombination in MQWs was verified by a large exciton binding energy of 193 meV and a short exciton lifetime of 170 ps. This work paves the way toward monolithic integration of band-engineered heterostructures for 2D quantum optoelectronics.

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Section: Monolithic Bandgap Engineering Of Wse 2 For Mqwsmentioning

confidence: 91%

Atomic–layer–confined multiple quantum wells enabled by monolithic bandgap engineering of transition metal dichalcogenides

Kim

Kang

et al. 2021

Sci. Adv.

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“…The structural compositions were analyzed by Raman, EDS, and XRD, as respectively shown in Figure a–c. The featured amorphous TiO x Raman peaks in the range of 202–244 cm –1 for all tested samples are shown in Figure a and Figure S5. Oxygen contents (Figure b) measured from EDS spectroscopy further support the surface oxidation, and furthermore, they indicate that oxidation rates are closely correlated with the laser power and scan velocity.…”

Section: Results and Discussionmentioning

confidence: 97%

Femtosecond Laser Generated Hierarchical Macropore/LIPSS Metasurfaces and Their Ultrabroadband Absorbance, Photothermal Properties, and Thermal-Induced Reflectance Oscillation

Liu

Zhang

et al. 2022

ACS Appl. Electron. Mater.

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As an emerging versatile technique, femtosecond laser structuring has shown its superior capacity to develop hierarchical micro/nanostructures. In this work, macropore/LIPSS micro/nanostructures (LIPSS: laser induced periodic surface structure) prepared by femtosecond laser ablation (fs-LA) of titanium in air are confirmed to be multifunctional metasurfaces, enabling ultrabroadband UV−vis−NIR− MIR absorbance, photothermal conversion, and thermal-emission induced reflectance oscillation. Different laser powers (2, 5, 8, and 15 W) and scanning velocities (50, 100, 200, and 400 mm/s) were adopted to tune the density/size of macropores, which gives the opportunities to evaluate their impact on multifunctions. It is found that macropore/ LIPSS structures with larger and deeper macropores possess the best performances for all functions. Reflectance (absorbance = 1 − reflectance) is used as the absorbance indicator for as-prepared opaque samples. A maximal >90% absorbance in the UV−vis−NIR range (0.2−2.5 μm) and >60% absorbance in the MIR range (2.5−16 μm) are achieved due to synergistic metasurface and structural effects, much better than many metal/dielectric metasurface absorbers prepared by lithography-based techniques. The photothermal conversion capacity of Ti substrates can be significantly enhanced after hierarchical micro/nanostructuring, as evidenced by the maximal detectable temperatures of 127 and 50 °C from the ablated/unablated samples after 8 min high-density light irradiation. Pre-coating of a 15 nm thick carbon layer on Ti substrates for fs-LA can effectively increase ablation efficiency to enlarge the macropore size and endow more carbon to the resultant structures, which are beneficial to achieve higher photothermal converters, as indicated by the temperature increase up to 147 °C, making them good candidates for sterilization applications. Multifunctions reported in this work including the first discovery of thermal-induced reflectance oscillation phenomenon for macropore/LIPSS structures prove that fs-LA is a one-step cost-effective technique for multifunctional metasurface manufacturing.

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“…For instance, changes in oxygen partial pressure impact the substance's content, and high-temperature reactions often result in an ordered arrangement for the film. 107,108 TiO 2−x has a large bandgap (3.2 and 3.0 eV for anatase and rutile, respectively). When the temperature rises above 300 K, Mardare et al 109 research's on the temperature dependency of electrical conductivity signified that a straightforward thermal activation conduction process might understand the reported conductivity of the TiO 2−x films.…”

Section: Vanadium Oxide (Vo X )mentioning

confidence: 99%

“…No sharp diffraction peak of any crystalline phase is observed, indicating all the films deposited at room temperature have amorphous structures with no preferred orientation. For instance, changes in oxygen partial pressure impact the substance’s content, and high-temperature reactions often result in an ordered arrangement for the film. , …”

Section: Materials Considerations For Wearable Bolometermentioning

confidence: 99%

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Padha,

Yadav,

Dutta

et al. 2023

ACS Appl. Electron. Mater.

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Incorporating nano-and microelectromechanical systems (NEMS/MEMS)-based sensors in clothing and developing more compact and flexible devices have gained popularity recently. NEMS/MEMS-based bolometers/sensors have gained significance due to their high sensitivity and accuracy in measuring physical parameters such as temperature, humidity, pressure, and infrared (IR) and ultraviolet (UV) radiations. When worn on the body, bolometers can be employed in various applications such as environmental monitoring or health tracking. This review highlights the progress of smart wearable bolometers as NEMS/ MEMS-based sensors in the healthcare industry. Instead of visiting multiple healthcare facilities or devices, now people can assess their health status by measuring body temperature, sensing motion, respiratory functioning, blood pressure, oxygen levels of the blood, and heart functioning by integrating these devices into fabriclike garments, socks, shoe insoles, wrist watches, and other pieces of clothing. The article concludes by describing their varied challenges and possible solutions and prospects.

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Effect of growth and electrical properties of TiOx films on microbolometer design

Cited by 10 publications

References 33 publications

Atomic–layer–confined multiple quantum wells enabled by monolithic bandgap engineering of transition metal dichalcogenides

Atomic–layer–confined multiple quantum wells enabled by monolithic bandgap engineering of transition metal dichalcogenides

Femtosecond Laser Generated Hierarchical Macropore/LIPSS Metasurfaces and Their Ultrabroadband Absorbance, Photothermal Properties, and Thermal-Induced Reflectance Oscillation

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

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