Effect of growth parameters on TiO2 thin films deposited using MOCVD

Nami, Z.; Misman, O.; Erbil, A.; May, G.S.

doi:10.1016/s0022-0248(97)00144-9

Cited by 26 publications

(12 citation statements)

References 12 publications

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“…The following physical quantities are relative to pressure. The density of the gas mixture in the reactor can be evaluated from the ideal gas law r ¼ ðpM=RTÞ, where R is the ideal gas constant, T is the temperature and M refers to the average molecular weight [10]. The mass diffusion coefficient can be described as this expression,…”

Section: Resultsmentioning

confidence: 99%

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Modeling analysis of the MOCVD growth of ZnO film

Liu

Zhu

et al. 2007

Journal of Crystal Growth

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Section: Resultsmentioning

confidence: 99%

“…Under these assumptions, the differential equation describing conservation of the physical quantity aforementioned can be simplified as follows: [9,10] (a) Conservation of mass:…”

Section: Mathematical Modelingmentioning

confidence: 99%

Modeling analysis of the MOCVD growth of ZnO film

Liu

Zhu

et al. 2007

Journal of Crystal Growth

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“…This led to extensive works directing to reach nanoscale structures. There are many techniques to synthesis titania thin films, including sol‐gel processing, chemical vapor deposition, reactive sputtering, anodic oxidation, electron‐beam evaporation, pulsed laser deposition and spray pyrolysis . Among all these techniques the sol‐gel approach is a low‐cost chemical procedure, allowing the growth of rough‐surface films at atmospheric pressure and on a large area with mesoporous structure …”

Section: Introductionmentioning

confidence: 99%

3D‐Ordered Mesoporous Chromium‐Doped Titania Thin Films: The Effect of Metal Dopant on the Microstructure, Mesoporous Symmetry, Hydrophobicity, and Surface Properties

Imani

Oveisi

2018

ChemistrySelect

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Attention to the mesoporous metal doped titania thin films has been increased significantly due to its wide potential applications, especially in photocatalytic activities. Determining the effect of surface property, mesoporous symmetry and metal dopant in mesoporous thin films materials have rarely reported, in particular, there are essential factors determining the performance of these materials. Herein, Cr@mesoporous titania thin films prepared by the sol‐gel approach. The surface properties of the thin films, as well as crystal structure, mesoporous symmetry, hydrophobicity, and surface morphology, were deeply discussed. Power spectral density and bearing analysis were calculated using atomic force microscopy. The results confirm that the thickness of all films was completely uniform without flooding, made by randomly oriented fine grains, and mesoporous structure. The Cr particles act as a porous site eliminator and increased the lattice mismatch in mesoporous titania thin films. The surface roughness, power spectral density, bearing area, and water contact angle of the films were significantly affected by Cr content. As the Cr content is increased, the porosities shrunk together and denser films were obtained. The roughness values display that the presence of Cr increases the homogeneity and the smoothness of the thin film surface with small grain size.

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“…2 Furthermore, thermo-mechanical reliability, low processing temperature, low-cost, and good adhesion are additional challenges, which should be overcome to realize embedded capacitors. Many studies have been done to achieve high-k and low-loss at low tempera-tures by thin film deposition, 3 anodization, 4 sol-gel process, 5 and polymer thick film composites. 6,7 For the polymer thick-film methods, a lot of work have been done on ceramic-polymer composites that employ traditional ceramics as fillers, such as BaTiO 3 or lead magnesium niobate-lead titanate (PMN/PT).…”

Section: Introductionmentioning

confidence: 99%

Effect of acrylic copolymer dispersants bearing epoxy groups on rheological and dielectric properties of carbon black‐filled epoxy system

Son

Kook

Lee

et al. 2011

J of Applied Polymer Sci

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In this article, the use of copolymeric dispersants with an acrylic backbone and epoxy side groups for formulating carbon black (CB)-epoxy composites are described. Six epoxy-containing acrylic copolymer dispersants were prepared from hexyl methacrylate (HMA), poly (ethylene glycol) ethyl ether methacrylate (PEGMA), and glycidyl methacrylate via a group transfer polymerization technique. The epoxy-containing acrylic copolymer of the highest concentration of PEGMA showed a desirable passivation effect on CB, and was found to lower the viscosity of the CB-epoxy paste, leading to the well-cured composite af-ter heat treatment. The thick composite film prepared by employing the [CB/acrylic dispersant/epoxy] paste was built up on a Cu plate by a screen printing process followed by thermal curing. The dielectric properties of the 3.1 vol % CB-filled epoxy film showed us high dielectric constant (Dk 4900) and rather low dissipation factor (Df 29%) at 1 MHz.

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Effect of growth parameters on TiO2 thin films deposited using MOCVD

Cited by 26 publications

References 12 publications

Modeling analysis of the MOCVD growth of ZnO film

Modeling analysis of the MOCVD growth of ZnO film

3D‐Ordered Mesoporous Chromium‐Doped Titania Thin Films: The Effect of Metal Dopant on the Microstructure, Mesoporous Symmetry, Hydrophobicity, and Surface Properties

Effect of acrylic copolymer dispersants bearing epoxy groups on rheological and dielectric properties of carbon black‐filled epoxy system

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