2019
DOI: 10.1080/02670844.2019.1625128
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Effect of heat treatment on the interfacial bonding between SiC coating and alumina plate

Abstract: In this paper, the SiC coating was deposited on an alumina substrate by a radio frequency magnetron sputtering method using a-SiC (99.999%) target. The produced SiC-Al 2 O 3 structure was heat treated in air through a range of temperatures. The effects of heat treatment temperature and duration on the surface roughness, interfacial bonding and surface hardness were investigated using experimental means such as optical surface profilometer, scanning electron microscope, energy dispersive X-ray analysis and hard… Show more

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Cited by 7 publications
(4 citation statements)
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“…The third-generation semiconductor SiC has wide band gap, high temperature, high-pressure resistance and other advantages [1,2]. In its applications, a damage-free and ultra-smooth SiC substrate surface is crucial because the surface quality influences the quality of the epitaxy layer and the device performance [3].…”
Section: Introductionmentioning
confidence: 99%
“…The third-generation semiconductor SiC has wide band gap, high temperature, high-pressure resistance and other advantages [1,2]. In its applications, a damage-free and ultra-smooth SiC substrate surface is crucial because the surface quality influences the quality of the epitaxy layer and the device performance [3].…”
Section: Introductionmentioning
confidence: 99%
“…There are many researches on preparing SiC coating with various method, such as CVD, precursor infiltration, pyrolysis, reactive sintering, embedding, atmospheric plasma spraying, polymer impregnation pyrolysis, melt infiltration, hybrid, chemical vapour infiltration, etc. [6][7][8][9][10][11][12][13][14][15][16][17][18][19]. Zhao et al [20] successfully prepared SiC coating on carbon fibres by LPCVD.…”
Section: Introductionmentioning
confidence: 99%
“…SiC has excellent properties under rigid conditions such as high hardness, excellent anti-oxidation properties and high thermal emissivity. Therefore, it is widely used as a multi-functional, protective coating in various fields [2][3][4]. Especially, when SiC coatings are oxidized under elevated temperatures, they tend to transform to SiO 2 , which can further improve the coating's anti-oxidation properties and thermal emissivity [5].…”
Section: Introductionmentioning
confidence: 99%