A systematic study on the effect of annealing temperature on the hardness of Tungsten carbides (WC) coatings were deposited by RF magnetron sputtering onto steel substrate (XC70) was carried out in this study. The as deposited coatings were heat treated in vacuum at temperature range between 500-1000 °C for 25 minutes. The mechanical properties of these coatings were investigated by Vickers microhardness tests at different applied loads and penetration depth of the indenter into the coatings. The microhardness tests were carried out as a function of applied loads between 10-1000 g, annealing temperature in the range of 500-1000 °C, and penetration depth of the indenter up to 25 μm. The microhardness of the coatings was found to decrease as a function of applied load and the penetration depth. The microhardness initially increases and thereafter decreases as the annealing temperature increases.