Effect of hydrogen on the integration process of photosensitive polyimide and its feasibility in advanced packaging

Ustad, Ruhan E.; Kim, Honggyun; Sajjad, Laraib; Chavan, Vijay D.; Choi, Kyeong-Keun; Kim, Deok-kee

doi:10.1016/j.apsusc.2024.161457

Applied Surface Science

2025

DOI: 10.1016/j.apsusc.2024.161457

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Effect of hydrogen on the integration process of photosensitive polyimide and its feasibility in advanced packaging

Ruhan E. Ustad,

Honggyun Kim,

Laraib Sajjad

et al.

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Effect of hydrogen on the integration process of photosensitive polyimide and its feasibility in advanced packaging

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References 34 publications

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