2024 3rd International Symposium on Semiconductor and Electronic Technology (ISSET) 2024
DOI: 10.1109/isset62871.2024.10779615
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Effect of Incident Energy on Deposition of Ge0.2Si0.8 Films on Ge Substrate: A Molecular Dynamics Study

Chaoyang Xie,
Tao Lin,
Duo Liang
et al.
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