Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators

Vorobiev, Andrei; Berge, John Arthur; Gevorgian, Spartak; Löffler, Markus; Olsson, Eva

doi:10.1063/1.3610513

Cited by 22 publications

(18 citation statements)

References 11 publications

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“…Additionally, processing induced differences in microstructure and interface roughness could also impact the piezoelectric response. 15,16 The DC electric field dependence of the permittivity, the tunability, is shown in Figure 3. Table I provides the calculated tunability and unbiased dielectric loss tangent at 100 kHz.…”

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confidence: 99%

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

Garten

Trolier-McKinstry

2014

Applied Physics Letters

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The electric field induced e 31,f piezoelectric response and tunability of Ba 0.7 Sr 0.3 TiO 3 (70:30) and Ba 0.6 Sr 0.4 TiO 3 (60:40) thin films on MgO and silicon was measured. The relative dielectric tunabilities for the 70:30 and 60:40 compositions on MgO were 83% and 70%, respectively, with a dielectric loss of less than 0.011 and 0.004 at 100 kHz. A linear increase in induced piezoelectricity to À3.0 C/m 2 and À1.5 C/m 2 at 110 kV/cm was observed in Ba 0.6 Sr 0.4 TiO 3 on MgO and Ba 0.7 Sr 0.3 TiO 3 on Si. Hysteresis in the piezoelectric and dielectric response of the 70:30 composition films was consistent with the positive irreversible dielectric Rayleigh coefficient. Both indicate a ferroelectric contribution to the piezoelectric and dielectric response over 40-80 C above the global paraelectric transition temperature. V C 2014 AIP Publishing LLC.

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confidence: 99%

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

Garten

Trolier-McKinstry

2014

Applied Physics Letters

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“…The observed initial 3-dB frequency drop at ~1 GHz, followed by the non-monotonic response from 2 to 7 GHz, could possibly be explained by acousto-optical interactions, and acoustic resonances confined by the coplanar waveguide electrodes [17,30,31]. This behavior has been observed in other thin film LN modulators as well [17], and can be alleviated by a slight roughening of the LN surface [32].…”

Section: Characterizationmentioning

confidence: 74%

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

et al. 2015

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Thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge(23)Sb(7)S(70), to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10(5) quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.

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“…The thickness mode components q and c 0 for different orientations of the Ba 0.5 Sr 0.5 TiO 3 and Ba 0.3 Sr 0.7 TiO 3 compositions are listed in Table 1 [14]. The proportionality factors A t between the non-loaded electromechanical coupling coefficient and the relative tunability of permittivity, calculated using (4) and (10), are also listed.…”

Section: C) Piezoelectric Effect Modellingmentioning

confidence: 99%

Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators

Vorobiev

Gevorgian

2013

Int. J. Microw. Wireless Technol.

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Emerging intrinsically tunable film bulk acoustic wave(BAW) resonators allow the development of new generation reconfigurable and agile microwave circuits. In this paper, we demonstrate the enhancement of tunable performance of the high Q-factor BaxSr1−xTiO3 BAW – solidly mounted resonators (BAW–SMR) by varying Ba concentration. The Ba0.5Sr0.5TiO3 BAW–SMR reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high Q-factor, up to 250 at 5.3 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc field-induced piezoelectric effect in paraelectric phase ferroelectrics. Higher coupling coefficient and tunability of resonance frequency of the Ba0.5Sr0.5TiO3 BAW–SMR are associated with higher tunability of permittivity. Strong anisotropy in field-induced piezoelectric effect is predicted with highest coupling coefficient in (001) direction of the BaxSr1−xTiO3 films. It is also shown that the tunability of series resonance frequency of Ba0.5Sr0.5TiO3 BAW–SMR is limited by relatively high and negative nonlinear electrostriction coefficient which is found to be m ≈ −4·1010 m/F. The BAW–SMR Q-factor is limited significantly by extrinsic acoustic loss associated with wave scattering at reflection from relatively rough top interface. The results of analysis show possible ways of further improvement of the performance of tunable BAW–SMR.

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Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators

Cited by 22 publications

References 11 publications

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators

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Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators

Cited by 22 publications

References 11 publications

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Enhanced tunable performance of high Q-factor BaxSr1−xTiO3 film bulk acoustic wave resonators

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Product

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About

Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators