2022
DOI: 10.1007/s10765-022-03110-0
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Effect of Intrinsic and Extrinsic Defects on the Structural, Thermal, and Electrical Properties in p-Type CZ-Si Wafers with Different Carrier Concentrations

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Cited by 3 publications
(1 citation statement)
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“…One aspect that was not touched upon is device-to-device variability. Wafer-level intrinsic or extrinsic variations in material properties can cause a difference in dynamic thermal responses [23]. For example, the heat capacity of Si can vary across the wafer which, in turn, influences the thermal time constant.…”
Section: Discussionmentioning
confidence: 99%
“…One aspect that was not touched upon is device-to-device variability. Wafer-level intrinsic or extrinsic variations in material properties can cause a difference in dynamic thermal responses [23]. For example, the heat capacity of Si can vary across the wafer which, in turn, influences the thermal time constant.…”
Section: Discussionmentioning
confidence: 99%