Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium

Чхало, Н. И.; Mikhaylenko, M. S.; Milkov, Alexei V.; Pestov, A. E.; Полковников, В. Н.; Salashchenko, N. N.; Strulya, I. L.; Zorina, M. V.; Zuev, S. Yu.

doi:10.1117/12.2269312

Cited by 4 publications

(1 citation statement)

References 16 publications

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“…Для вакуумного (ВУФ) и экстремального (ЭУФ) ультрафиолетовых диапазонов электромагнитного излучения (λ = 10 − 200 nm) значение эффективной шероховатости поверхности должно быть менее 1 nm, а точность формы -лучше λ/14, где λ -рабочая длина волны. Наиболее перспективным материалом для подложек зеркал космических телескопов видимого и инфракрасного (ИК) диапазонов является бериллий, однако при переходе в коротковолновый диапазон достижение требуемых значений шероховатости ни механической, ни ионной полировкой оказывается невозможным [2]. Приемлемые параметры шероховатости на уровне 1.5 nm были получены при покрытии бериллия аморфным никелем с последующей его полировкой.…”

Section: Introductionunclassified

Нанесение Жидкого Стекла На Подложки Оптических Элементов И Его Молекулярный Состав

Petrova¹,

Михайленко²,

Зорина³

et al. 2023

Журнал Технической Физики

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Section: Introductionunclassified

Нанесение Жидкого Стекла На Подложки Оптических Элементов И Его Молекулярный Состав

Petrova¹,

Михайленко²,

Зорина³

et al. 2023

Журнал Технической Физики

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Prospects for the Application of Liquid Glass for Smoothing the Surface of Optical Elements

Mikhailenko,

Zorina,

Petrova

et al. 2023

J. Surf. Investig.

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The Potential of Liquid Glass Using for Smoothing the Surface of Optical Elements

Mikhaylenko,

Zorina,

Petrova

et al. 2023

Poverhnostʹ. Rentgenovskie, sinhrotronnye i nejtronnye issledov

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It is proposed to use “liquid glasses” of different compositions as substrates for space-based X-ray optical elements. One of the main requirements for such materials is the smallest mass and the possibility of surface treatment. Special requirements are imposed on the surface roughness, which must be less than 1 nm, and the shape accuracy should be at the level of units of nanometers. It is proposed to use a class of compounds based on alkali metal silicates or strong organic bases as a material, which allows forming the required shape and roughness, as well as providing subsequent treatment. The effect of smoothing the surface roughness of liquid glasses of three different compositions deposited on chromium and nickel films has been studied. Before and after the deposition of the structures, the roughness of all surfaces has been studied using an atomic force microscope. The roughness has been calculated using the power spectral density function (PSD function). The structures deposited on the surface, were irradiated with accelerated argon ions with an energy of 800 eV. The etch depth and effective roughness have been measured. One of the studied compositions has demonstrated a satisfactory reduction in roughness and the stability of this effect during ion etching.

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Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium

Cited by 4 publications

References 16 publications

Нанесение Жидкого Стекла На Подложки Оптических Элементов И Его Молекулярный Состав

Нанесение Жидкого Стекла На Подложки Оптических Элементов И Его Молекулярный Состав

Prospects for the Application of Liquid Glass for Smoothing the Surface of Optical Elements

The Potential of Liquid Glass Using for Smoothing the Surface of Optical Elements

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