“…Single crystals and films of A 2 B 6 semiconductor compounds, in particular CdS, and related multilayer heterostructures are widely used for the creation of various micro-, nano-, and optoelectronic devices, including those for solar power engineering [1][2][3][4]. At present, the influence of heat treatments, laser annealing, microwave processing, and the ion and electron bombardment on the structure, composition, and optical properties of A 2 B 6 compounds and the process of atomic interdiffusion at the interfaces of multilayer systems based on these semiconductors have been thoroughly studied [5][6][7][8][9][10][11][12][13]. In recent years, we have used implantation of Ba + ions into CdTe and CdS [11,12] to obtain doped single crystalline layers and Cd 1 -x Ba x Te and Cd 1 -x Ba x S surface and subsurface layers.…”