2019
DOI: 10.3897/j.moem.5.4.52311
|View full text |Cite
|
Sign up to set email alerts
|

Effect of low-energy electron irradiation on voltage-capacity curves of Al/SiO2/Si structure

Abstract: Charging of dielectric targets by electron irradiation is a well-known phenomenon which should be taken into account in characterization of dielectric materials and coatings with electron microscopy, in electron beam lithography, in development of dielectric coatings for spacecrafts and other fields of science and engineering. Charging kinetics is strongly affected by spatial distribution of electrons and holes formed by irradiation. At the experimental electron beam energy electron penetration depth is smalle… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 21 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?