Effect of Mg doping in the gas-sensing performance of RF-sputtered ZnO thin films

Vinoth, E.; Gowrishankar, S.; Gopalakrishnan, N.

doi:10.1007/s00339-018-1852-6

Cited by 23 publications

(11 citation statements)

References 27 publications

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“…Despite this, the response magnitudes did not show significant changes. Generally, the MTO3 films showed better medium-term stability displaying 8% and 6% less deviation in the base line resistance during the whole testing period (see experimental T op : temperature of operation, t res : response time, * R a /R g calculated from [19,39,45]…”

Section: Gas Sensing Propertiesmentioning

confidence: 99%

“…In the literature, there are several examples of noble metals (Pd, Pt), rare earth metals (Ce, Pr), and metals (Zn, Al) improving the sensitivity and selectivity of various MOXs including SnO 2 [10,[12][13][14][15][16]. Among these materials, magnesium (Mg) is attractive, as it has proved to improve sensitivity to ethanol, H 2 , CO, and ammonia when incorporated into ZnO to form Mg-doped ZnO [17][18][19][20][21]. Similarly, Mg-doped TiO 2 and Mg-doped In 2 O 3 have shown to improve sensitivity to CO and ethanol, respectively [3,22].…”

Section: Introductionmentioning

confidence: 99%

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Influence of Mg Doping Levels on the Sensing Properties of SnO2 Films

Bendahmane

Tomić

Touidjen

et al. 2020

Sensors

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This work presents the effect of magnesium (Mg) doping on the sensing properties of tin dioxide (SnO2) thin films. Mg-doped SnO2 films were prepared via a spray pyrolysis method using three doping concentrations (0.8 at.%, 1.2 at.%, and 1.6 at.%) and the sensing responses were obtained at a comparatively low operating temperature (160 °C) compared to other gas sensitive materials in the literature. The morphological, structural and chemical composition analysis of the doped films show local lattice disorders and a proportional decrease in the average crystallite size as the Mg-doping level increases. These results also indicate an excess of Mg (in the samples prepared with 1.6 at.% of magnesium) which causes the formation of a secondary magnesium oxide phase. The films are tested towards three volatile organic compounds (VOCs), including ethanol, acetone, and toluene. The gas sensing tests show an enhancement of the sensing properties to these vapors as the Mg-doping level rises. This improvement is particularly observed for ethanol and, thus, the gas sensing analysis is focused on this analyte. Results to 80 ppm of ethanol, for instance, show that the response of the 1.6 at.% Mg-doped SnO2 film is four times higher and 90 s faster than that of the 0.8 at.% Mg-doped SnO2 film. This enhancement is attributed to the Mg-incorporation into the SnO2 cell and to the formation of MgO within the film. These two factors maximize the electrical resistance change in the gas adsorption stage, and thus, raise ethanol sensitivity.

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Section: Gas Sensing Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence of Mg Doping Levels on the Sensing Properties of SnO2 Films

Bendahmane

Tomić

Touidjen

et al. 2020

Sensors

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“…Figure 6. Gas sensing mechanism of an n-type semiconducting gas sensors [18] Figure 7. Changes in the resistance of the thin film structure due to the insertion and exhaust to 200 ppm of H2 Figure 8.…”

Section: Gas Sensing Propertiesmentioning

confidence: 99%

Gas Sensing and Structural Properties of a Nano-structure MoO3-based Hydrogen Sensor

Kahkesh

Fattah

Rahmani

2019

IJEE

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In this research, thin films of molybdenum trioxide were deposited on a glass substrate using Doctor Blade method. Ammonium Heptamolbudate tetrahydrate (NH4)6Mo7O24 powder is considered as a precursor to this study. Growth of the samples in three main directions of (020), (040) and (060) showed the formation of a layered structure and also the formation of α-phase of molybdenum oxide. In addition, scanning electron microscope imaging of the samples showed flat micro-capsule like structure. Furthermore, gas sensing properties of the fabricated structure were studied in expose to different concentrations of hydrogen gas. The highest and lowest sensitivities were reported about 16 and 91%, for 100 and 1000 ppm of hydrogen gas, respectively, which shows more sensitivity compare to previous studies. Moreover, the fabricated sensor exhibits good stability as well as repeatability for H2 gas detection.

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“…The use of ZnO gas sensors applied to ammonia detection has been studied in different ways. In recent years, these studies are mainly in the pursuit of a large surface-to-volume ratio and heterojunction interface, with a simultaneous positive effect [5][6][7][8]. The metal oxides of ZnO have demonstrated to be fabricated with different structures, among which the nanostructured ZnO such as nanoellipsoids [6], nanorods [8], nanoparticles [9], nanoflowers [10], etc.…”

Section: Introductionmentioning

confidence: 99%

Nanostructured ZnO/Ag Film Prepared by Magnetron Sputtering Method for Fast Response of Ammonia Gas Detection

Zheng

Wen

et al. 2020

Molecules

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Possessing a large surface-to-volume ratio is significant to the sensitive gas detection of semiconductor nanostructures. Here, we propose a fast-response ammonia gas sensor based on porous nanostructured zinc oxide (ZnO) film, which is fabricated through physical vapor deposition and subsequent thermal annealing. In general, an extremely thin silver (Ag) layer (1, 3, 5 nm) and a 100 nm ZnO film are sequentially deposited on the SiO2/Si substrate by a magnetron sputtering method. The porous nanostructure of ZnO film is formed after thermal annealing contributed by the diffusion of Ag among ZnO crystal grains and the expansion of the ZnO film. Different thicknesses of the Ag layer help the formation of different sizes and quantities of hollows uniformly distributed in the ZnO film, which is demonstrated to hold superior gas sensing abilities than the compact ZnO film. The responses of the different porous ZnO films were also investigated in the ammonia concentration range of 10 to 300 ppm. Experimental results demonstrate that the ZnO/Ag(3 nm) sensor possesses a good electrical resistance variation of 85.74% after exposing the sample to 300 ppm ammonia gas for 310 s. Interestingly, a fast response of 61.18% in 60 s for 300 ppm ammonia gas has been achieved from the ZnO/Ag(5 nm) sensor, which costs only 6 s for the response increase to 10%. Therefore, this controllable, porous, nanostructured ZnO film maintaining a sensitive gas response, fabricated by the physical deposition approach, will be of great interest to the gas-sensing community.

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Effect of Mg doping in the gas-sensing performance of RF-sputtered ZnO thin films

Cited by 23 publications

References 27 publications

Influence of Mg Doping Levels on the Sensing Properties of SnO2 Films

Influence of Mg Doping Levels on the Sensing Properties of SnO2 Films

Gas Sensing and Structural Properties of a Nano-structure MoO3-based Hydrogen Sensor

Nanostructured ZnO/Ag Film Prepared by Magnetron Sputtering Method for Fast Response of Ammonia Gas Detection

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