Effect of Microbubbles on Ozonized Water for Photoresist Removal

Takahashi, Masayoshi; Horibe, Hideo; Matsuura, Kouhei; Tatera, Katsumi

doi:10.2494/photopolymer.28.293

Cited by 27 publications

(14 citation statements)

References 17 publications

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“…As demonstrated in our earlier work [15,16], which are produced together with H and O radicals [18]. According to some findings [19][20][21][22][23], OH radicals actually have higher reactivity to benzene rings than either H or O radicals. The decrease over 1.5% might be attributable to the decreased production rate of H radicals by the catalytic poisoning of the catalyst surface by O atoms.…”

Section: Resultsmentioning

confidence: 74%

Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Yamamoto

Taki

Sunada

et al. 2018

J. Photopol. Sci. Technol.

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Photoresist removal method using hydrogen radicals, which are produced on a tungsten hot-wire catalyst, is effective to resolve some environmental and industrial problems in conventional methods for the fabrication of electronic devices. However, its removal rate is not as good as that of the conventional ones. We have previously described that the removal rate of a positive-tone novolac photoresist is enhanced by the addition of a small amount of oxygen gas to the atmosphere, in which hydrogen radicals are produced. Oxidizing radicals, such as OH and O radicals, can be produced together with H radicals. In present study, we examined the effects of oxygen addition on base polymers of KrF and ArF photoresists: the former is poly(vinyl phenol) (PVP), and the latter is poly(methyl methacrylate) (PMMA). Effects of oxygen addition on PVP was confirmed, as was found for the novolac photoresist. On the other hand, the effects on PMMA were different from the cases of the novolac photoresist and PVP. Results were ascribed to the presence or absence of benzene rings, the properties of polymers and the reactivity of oxidizing radicals.

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Section: Resultsmentioning

confidence: 74%

Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Yamamoto

Taki

Sunada

et al. 2018

J. Photopol. Sci. Technol.

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“…In contrast to traditional ozone bubble, the COD removal efficiency was higher by 20% and the time required for 80% removal of colour was less by 140 min in the MBs system. More studies [66–72] showed that the synergistic effects of the MNBT and ozone/UV could give full play to their advantages to effectively enhance the decomposition of organics, the biodegradability and the effect of decolourisation.…”

Section: Sewage (Waste) Water Treatmentmentioning

confidence: 99%

Applications of micro–nano bubble technology in environmental pollution control

Xiao

Aftab

2019

Micro & Nano Letters

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Owing to some advantages of high oxidation capacity, high mass-transfer efficiency, high utilisation rate of reagents, simple system for treating pollutants, micro-nanobubble technology (MNBT) has gradually attracted attention and has been successfully applied in environmental pollution control. Currently, its applications in this field are mainly in the aspects of surface water purification, sewage (waste) water treatment, soil and groundwater remediation and sludge treatment which are reviewed. These studies primarily focus on the MNB generation (MNBG) methods, the parameters of pollution treatment and its effect improvement, the coupling techniques of this technology and other advanced oxidation technologies. However, in order to successfully promote its applications to the actual environmental pollution control process, especially the industrial scale, the following efforts are required: covariant response mechanism of water qualitymicro-nano aeration parametersbubble characteristics, further optimisation of synergistic process with other advanced oxidation methods, development of lower energy consumption and more efficient MNBG devices. After discussion and analysis, this work further points out that the purification of exhaust gas such as volatile organic compounds (VOC) and flue gas is one of the research directions worth exploring in the future application of the MNBT.

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“…Next, his group reported that the ∙OH producing in both cases of air (oxygen microbubbles and nitrogen microbubbles) in the acidic condition at pH 2 and 3 2 and the generation of hydroxyl radicals from the collapse of oxygen or air microbubbles was markedly enhanced by the existence of copper ion catalyst by the copper wire under pH2.2 acidic HCl solution 3 . Also, the microbubbles on ozonized water indicated the presence of hydroxyl radical by the collapse of microbubble 4 . Recent papers are referred the above papers 5 and the oxygen nanobubble stability was confirmed to be pH-dependent and the collapsed oxygen nanobubble generate the free radical that induced the photodegradation of oxytetracycline 6 .…”

Section: Introductionmentioning

confidence: 97%

Free radical degradation in aqueous solution by blowing hydrogen and carbon dioxide nanobubbles

Fujita

Kurokawa

Han

et al. 2021

Sci Rep

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The main findings are the hydroxyl radical scavenging and the superoxide anion diminishing by mixing the carbon dioxide (CO2) nanobubbles after hydrogen nanobubble blowing in water and alcohol aqueous solution. The nanobubbles produce the hydroxyl radical by ultrasonic waves, changing the pH and catalyst and so on, while the nanobubble is very reactive to scavenge free radicals. In this research especially hydrogen (4% H2 in argon) and CO2 nanobubbles have been blown into hydrogen peroxide (H2O2) added pure water, ethanol, and ethylene glycol aqueous solution through a porous ceramic sparger from the gas cylinder. The aqueous solutions with H2O2 are irradiated by ultraviolet (UV) light and the produced hydroxyl radical amount is measured with spin trapping reagent and electron spin resonance (ESR). The CO2 nanobubble blowing extremely has reduced the hydroxyl radical in water, ethanol, and ethylene glycol aqueous solution. On the other hand, when H2 nanobubbles are brown after CO2 nanobubble blowing, the hydroxyl radical amount has increased. For the disinfection test, the increase of hydroxyl radicals is useful to reduce the bacteria by the observation in the agar medium. Next, when the superoxide anion solution is mixed with nanobubble containing water, ethanol, and ethylene glycol aqueous solution, H2 nanobubble has reduced the superoxide anion slightly. The water containing both CO2 and H2 nanobubble reduces the superoxide anion. The less than 20% ethanol and the 30% ethylene glycol aqueous solution containing CO2 nanobubbles generated after H2 nanobubble blowing can diminish the superoxide anion much more. While the H2 nanobubble blowing after CO2 nanobubble blowing scavenges the superoxide anion slightly. The experimental results have been considered using a chemical reaction formula.

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Effect of Microbubbles on Ozonized Water for Photoresist Removal

Cited by 27 publications

References 17 publications

Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Applications of micro–nano bubble technology in environmental pollution control

Free radical degradation in aqueous solution by blowing hydrogen and carbon dioxide nanobubbles

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