“…In addition to kerf loss, the sawing process produces other defects such as surface roughening, surface and subsurface micro-cracks, local residual stress, phase transformation, among others [1]. The impact of these defects on the mechanical strength of silicon wafers has been studied by various authors from different viewpoints, including the effects of grit size, shape and distribution [2][3][4], wafer type and sawing orientation [5,6], crystallinity [7], post-sawing processes [8,9], and fracture mechanics-based prediction [10]. However, the majority of these studies are performed on full-size wafers or large samples, which tend to exacerbate the effect of wafer tapering commonly observed in as-sawn wafers.…”