Effect of modulation structure on the microstructural and mechanical properties of TiAlSiN/CrN thin films prepared by high power impulse magnetron sputtering

Liu, Hui; Yang, Fu-Chi; Tsai, Yi-Jing; Wang, Xiaojian; Li, Wei; Chang, Chi-Lung

doi:10.1016/j.surfcoat.2018.11.069

Cited by 31 publications

(19 citation statements)

References 26 publications

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“…As the results show, the crystallite sizes have also reduced by the presence of Si and Al atoms in the TiAlN, TiAlSiN, and TiAlSiCN thin films. The same issue was reported in previous study where the reason for crystallite size reduction was discussed to be due to the presence of amorphous SiN x in TiAlSiN thin films 10 . It is notable that in recent attempts on the growth of TiN-based layers 7,9,14 XRD patterns were different with much less intense peaks than the data in Fig.…”

Section: Discussionsupporting

confidence: 80%

TiCrN-TiAlN-TiAlSiN-TiAlSiCN multi-layers utilized to increase tillage tools useful lifetime

Malvajerdi

Ghanaatshoar

et al. 2019

Sci Rep

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For the first time, a hard wear-resistant multi-layer of TiCrN-TiAlN-TiAlSiN-TiAlSiCN was deposited on carbon steel CK45-based tillage tools to increase their useful lifetime. The layers were deposited by using an arc-PVD method without post-annealing procedures. XRD and EDX data indicated that TiCrN, TiAlN, TiAlSiN, and TiAlSiCN formed individually and as a multi-layer of high-quality crystalline layers with mostly cubic structures. The studies on the multi-layers coating morphology, roughness and hardness gave reasonable results as a roughness of 35 nm and a hardness of 32.2 GPa. The coated sweep duck blade tillage tools were tested on the field along with a soil bin to obtain their wear behavior at different traveling distances. The draft force of all blades showed promising results. As the coated layers were worn off, their draft force increased. In comparison with single-layer coatings, the multi-layer structure demonstrated an increase in the useful lifetime of the blades.

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Section: Discussionsupporting

confidence: 80%

TiCrN-TiAlN-TiAlSiN-TiAlSiCN multi-layers utilized to increase tillage tools useful lifetime

Malvajerdi

Ghanaatshoar

et al. 2019

Sci Rep

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“…In parallel, H 3 /E 2 values were similar for all multilayers and exceeded the previously mentioned Cr/CrN system and others such as TiAlSiN/CrN 13 and TiSiN/Ni 17 . Nevertheless, all values around 0.95 are somewhat below those considered optimal for coatings with high wear resistance 28,29 .…”

Section: Mechanical Propertiessupporting

confidence: 76%

“…Some other advantages can be acquired by mixing different periods in non-isostructured coatings: since different layer sizes may induce the formation of phases with distinct crystalline structures 2,[11][12][13] , materials properties can be varied along the coating thus resulting in more advanced elasto-plastic or diffusional effects. Advantageously, once the variation in films architecture by magnetron sputtering (MS) can be obtained only by redistributing layer sizes, no physical adjustment is necessary to produce such coatings.…”

Section: Introductionmentioning

confidence: 99%

Structure, mechanical properties and oxidation resistance of iso and non-iso architected TiN/Cr multilayers coatings deposited by magnetron sputtering

et al. 2021

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“…The hardness (H) and effective elastic modulus (E*) were measured by nanoindentation. Moreover, the elastic modulus (E) was calculated using the formula of E* = E/(1 − ν 2 ), where ν is the Poisson's ratio [46,47]. Figure 7 The result shows that the hardness of the CVD TiAlSiN coating was significantly higher than that of PVD TiAlSiN coating, which is related to the higher Si content in PVD coating.…”

Section: Mechanical Properties Of the As-deposited Cvd Tialsin And Pvd Tialsin Coatingsmentioning

confidence: 99%

Structure and Mechanical Properties of PVD and CVD TiAlSiN Coatings Deposited on Cemented Carbide

Qiu²,

et al. 2021

Crystals

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This work reports the results of our investigation of the structure and mechanical properties of physical vapor deposition (PVD) and chemical vapor deposition (CVD) TiAlSiN coatings deposited on cemented carbide substrates. For the first time, a novel nanocomposite of Ti0.13Al0.85Si0.02N coating deposited from TiCl4-AlCl3-SiCl4-NH3-H2 gas precursors was prepared by low pressure chemical vapor deposition (LPCVD) at 780 °C and a pressure of 60 mbar, while PVD Ti0.31Al0.60Si0.09N coating was prepared using the arc ion plating method. The investigation results including morphology, microstructure, chemical composition, phase component, and hardness were carried out by scanning electron microscopy (SEM) equipped with energy dispersive spectrometer (EDS), transmission electron microscopy (TEM), X-ray diffraction (XRD), and nano-indentator. TEM results revealed that both PVD and CVD TiAlSiN coatings consisted of nanocrystalline embedded in SiNx amorphous. The nanohardness of CVD Ti0.13Al0.85Si0.02N coating obtained in this work was 31.7 ± 1.4 GPa, which was 35% higher than that of the PVD Ti0.31Al0.60Si0.09N coating.

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Effect of modulation structure on the microstructural and mechanical properties of TiAlSiN/CrN thin films prepared by high power impulse magnetron sputtering

Cited by 31 publications

References 26 publications

TiCrN-TiAlN-TiAlSiN-TiAlSiCN multi-layers utilized to increase tillage tools useful lifetime

TiCrN-TiAlN-TiAlSiN-TiAlSiCN multi-layers utilized to increase tillage tools useful lifetime

Structure, mechanical properties and oxidation resistance of iso and non-iso architected TiN/Cr multilayers coatings deposited by magnetron sputtering

Structure and Mechanical Properties of PVD and CVD TiAlSiN Coatings Deposited on Cemented Carbide

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