Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

“…It has been reported as (1 0 0)-oriented film [46]. This kind of (1 0 0)-oriented textured film exhibits higher dielectric constant than the randomly oriented film and the (1 1 1)-oriented film [46]. The deposited films were pyrolyzed at 200…”

Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films

“…The SOI wafers have 10 µm structural Si and 1 µm buried oxide (BOX). 16 The Pb/Ti/Zr composition of the precursor solution was 120/30/70 for tetra-PZT and 120/52/48 for MPB-PZT, respectively. After PZT deposition, Pt (150 nm)/Ti (10 nm) top electrodes were deposited.…”

Study of (111)-oriented PZT thin films prepared by a modified sol–gel method

“…For the nucleation and orientation of PZT on Pt/Ti electrodes, a Ti-enriched layer near the electrode interface may be formed due to the diffusion of active titanium element which facilitates the nucleation and in situ creates a perovskite-seeding layer for the rest of the film due to the chemical reaction [8]. At the same time, the obtained preferential orientation may be due to lattice matching between the PZT film and Pt layer [20,21]. Figure 2 shows the XRD patterns of the P 1.1 ZT films deposited on PT seeded Pt/Ti substrates under different annealing conditions.…”