Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

Hao, Junying; Liu, Weimin; Xue, Qunji

doi:10.1016/j.jnoncrysol.2006.10.008

Cited by 16 publications

(6 citation statements)

References 42 publications

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“…This effect may be a consequence of the chemical desorption of N 2 molecules formed in the reactions between nitrogen atoms from the surface and gas phase. Thus, higher N 2 concentration in the gaseous mixture increases a probability of such reactions [16]. Simultaneously, one observes a decrease of the layer thickness, which is in agreement with lowering of the intensities of FTIR absorption bands (Fig.…”

Section: Resultssupporting

confidence: 79%

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Nowak

Jonas

2008

PAC

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Polycarbonate (PC) possesses many commercial applications. However, PC is still limited to non-abrasive and chemical-free environments due to its low hardness, low scratching resistance and high susceptibility to chemical attacks. To overcome this limitation, PC can be coated by hydrogenated amorphous carbon layers. The a-C:H layers have very attractive properties such as high hardness, infrared transparency, chemical inertness, low friction coefficients, and biocompatibility. Addition of nitrogen in the structure allows lowering internal stress and improve tribological properties of a-C:H layers. In this work, a-C:N:H layers were deposited from mixture CH4/N2 gases by RF PECVD method. Effects of the nitrogen incorporation on structure and tribological properties of deposited layers were investigated. The structure of layers were characterized by Fourier Transform Infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The friction coefficient, wear resistance of a-C:H:N layers were estimated by tribometer in ball-on-disc configuration. The IR spectra of the obtained layers have demonstrated a presence of nitrogen bonded both to carbon and to hydrogen. A formation of the following bonds has been confirmed: -C?N, -NH2, -C?NH2, >C=NH. They are all typical for a-C:N:H layers. The tribological tests have shown that the layers reduce the friction coefficient of the polycarbonate (up to 50 %) and considerably improve wear resistance.

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Section: Resultssupporting

confidence: 79%

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Nowak

Jonas

2008

PAC

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“…Experiments are carried out with the PAMPRE set-up, based on a Radio-Frequency Capacitively Coupled Plasma (RF CCP) at 13.56 MHz. [18] RF plasmas are also used in nitrogen methane mixtures for the production of CNx hard films [29] or hydrogenated amorphous carbon films (a-C:H) [30]. Their efficiency to produce solid material explains their interest to simulate the formation of Titan's aerosols.…”

Section: Sample Productionmentioning

confidence: 99%

Laboratory analogues simulating Titan's atmospheric aerosols: Compared chemical compositions of grains and thin films

Carrasco

Jomard

Vigneron

et al. 2016

Planetary and Space Science

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Two sorts of solid organic samples can be produced in laboratory experiments simulating Titan's atmospheric reactivity: grains in the volume and thin films on the reactor walls. We expect that grains are more representative of Titan's atmospheric aerosols, but films are used to provide optical indices for radiative models of Titan's atmosphere.The aim of the present study is to address if these two sorts of analogues are chemically equivalent or not, when produced in the same N 2 -CH 4 plasma discharge. The chemical compositions of both these materials are measured by using elemental analysis, XPS analysis and Secondary Ion Mass Spectrometry. The main parameter probed is the CH 4 /N 2 ratio to explore various possible chemical regimes. We find that films are homogeneous but significantly less rich in nitrogen and hydrogen than grains produced in the same experimental conditions. This surprising difference in their chemical compositions could be explained by the efficient etching occurring on the films, which stay in the discharge during the whole plasma duration, whereas the grains are ejected after a few minutes. The higher nitrogen content in the grains possibly involves a higher optical absorption than the one measured on

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“…The two peaks at high binding energy (close to 288 and 290 eV) were corresponding to the sp 3 C―C and C―O bonding in C 3 N 4 environment respectively. The fourth way was to fit the C1s spectra into four peaks, locating at 284.3, 285.2, 286.5 and 287.9 eV . The peaks were thought to relate with sp 2 CC bonding, sp 3 C―C bonding, C―N bonding and C―O bonding, respectively.…”

Section: Resultsmentioning

confidence: 99%

In‐situ stress suppression of hydrogenated a‐CN_x film prepared via Ar gas introduction

Wang

Zhang

2016

Surface & Interface Analysis

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Evolution of hydrogenated amorphous carbon nitride films was investigated with an introduction of Ar gas in the deposition. The results showed that compressive stress of the films decreased versus an increase of Ar flow rate. Especially, at an Ar flow rate of 5 sccm the film exhibited lower compressive stress, higher hardness and lower root‐mean‐square (rms) roughness than the films deposited without Ar gas introduction. Structural analysis showed that the films with higher hardness, low compressive stress and lower rms roughness had relatively high sp2 and nitrogen content. It was attributed to the assistance of Ar plasma, which can cause N atom to enter graphite ring easily and form curved graphite microstructure. Copyright © 2016 John Wiley & Sons, Ltd.

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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

Cited by 16 publications

References 42 publications

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Laboratory analogues simulating Titan's atmospheric aerosols: Compared chemical compositions of grains and thin films

In‐situ stress suppression of hydrogenated a‐CN_x film prepared via Ar gas introduction

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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

Cited by 16 publications

References 42 publications

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Influence of nitrogen on the tribological properties of a-C:H layers on the polycarbonate substrates

Laboratory analogues simulating Titan's atmospheric aerosols: Compared chemical compositions of grains and thin films

In‐situ stress suppression of hydrogenated a‐CNx film prepared via Ar gas introduction

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In‐situ stress suppression of hydrogenated a‐CN_x film prepared via Ar gas introduction