2017
DOI: 10.1021/acs.langmuir.7b02922
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Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis

Abstract: There are broad interests in selective and localized synthesis in nanodomains of self-assembled block copolymers (BCPs) for a variety of applications. Sequential infiltration synthesis (SIS) shows promise to selectively grow a controllable amount of materials in one type of nanodomain of a self-assembled BCP film. However, the effects of nanostructured domains in a BCP film and SIS cycles on the material growth behavior of SIS are rarely studied. In this work, we investigated the growth behavior of TiO SIS wit… Show more

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Cited by 48 publications
(62 citation statements)
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“…A progressive scaling of the diffusivity is observed as a function of the size of the diffusing molecules . Recent results about the infiltration in PMMA of TiCl 4 molecules, which has similar size of TMA, report a diffusivity of 0.7 × 10 −12 cm 2 s −1 consistently with this picture . Conversely, ex situ analysis by Leng and Losego provided significantly different diffusion coefficients for TMA molecules in PMMA .…”
Section: Discussionmentioning
confidence: 99%
“…A progressive scaling of the diffusivity is observed as a function of the size of the diffusing molecules . Recent results about the infiltration in PMMA of TiCl 4 molecules, which has similar size of TMA, report a diffusivity of 0.7 × 10 −12 cm 2 s −1 consistently with this picture . Conversely, ex situ analysis by Leng and Losego provided significantly different diffusion coefficients for TMA molecules in PMMA .…”
Section: Discussionmentioning
confidence: 99%
“…[27][28][29][30][31][32][33][34][35][36][37] The infiltration process proceeds via sorption (diffusion) and block-selective reaction of vapor-phase organometallic precursors into the polymer blocks with suitable reactive moieties to generate infused inorganic materials within the target BCP microdomains. [38][39] The hybrid nanocomposite thus formed can also be converted to an inorganic nanostructure inheriting the original structure of the polymer microdomains, 34,36 not only producing various functional nanostructures in a simple process but also enabling all-organic BCP morphologies to be fully resolved. 31 ALD of metal oxide precursors into cylinder-and gyroidforming BCPs has been used to generate 1D and 3D nanostructures for a broad variety of nanotechnologies such as gas sensors, solar cells, photocatalysts, and pattern transfer masks.…”
Section: Introductionmentioning
confidence: 99%
“…Peng et al also investigated effects of BCP nanodomains on precursor sorption/diffusion behavior and kinetics during SIS (Figure 5D). 81 The precursor TiCl 4 diffuses through PS domains and combines with carbonyl groups and Ti-OH groups in the PMMA domains of BCPs. Then, during the purge stage, excess free TiCl 4 molecules diffuse out of the BCP film again mainly through PS domains.…”
Section: Direct Depositionmentioning
confidence: 99%