Abstract:Abstract. Ti-Si-N nanocomposite films were prepared by co-sputtering Ti and Si targets in Ar/N 2 gas atmosphere. The effect of N 2 flow rate on the structure, adhesion strength and friction coefficient of the deposited films was studied by using X-ray diffraction, atom force microscope, field emission scanning electron microscopy and multi-functional tester for material surface properties. The Ti-Si-N films had a fine, smooth and compact structure with TiN nanograins embedded in an amorphous Si 3 N 4 matrix. T… Show more
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