Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering

The microstructure of a multielement nanostructured (TiZrHfVNbTa)N coating and its resistance to irradiation with Au– ions

“…It is common knowledge that Au -ions have a high sputtering ratio [7,8]. Accordingly, partial sputtering of N atoms (due to their weaker bonding) from the surface was observed and defects (vacancy and interstitial loops) were formed [9][10][11][12][13][14]. Implanted Au -ions in the coating formed nanocrystallites of a "spherical" shape with a size of several nanometers as was the case in the experiments with Cu -and Au -ions implanted into SiO 2 in [9].…”

“…Implanted Au -ions in the coating formed nanocrystallites of a "spherical" shape with a size of several nanometers as was the case in the experiments with Cu -and Au -ions implanted into SiO 2 in [9]. The efficiency of recombination of point defects in a nanostructured coating is increased near cascades or within them due to the proximity of interfaces (boundaries between nanograins or double and triple junctions of nanograins) [12]. In addition, the volume ratio of boundaries is increased in the process of implantation with heavy ions due to a reduction in the size of nanograins from 8 to 5 nm (or less).…”

Nanostructured multielement (TiHfZrNbVTa)N coatings before and after implantation of N+ ions (1018cm−2): Their structure and mechanical properties

“…A new class of materials -high-entropy alloys (HEA), which consist of at least 5 atoms with atomic content from 5 to 35 at% -are under great interest nowadays due to their exceptional wealth of physical-mechanical characteristics [8][9][10][11]13,12,[16][17][18][19][20][21][22]. Several works have been performed so far to obtain a comprehensive understanding of the effect of constitutive elements on the microstructure, phase composition and mechanical properties of HEA [23][24][25][26][27][28][29][30][31][32][33][34][35][36][37].…”

“…The main advantages of ion implantation are preservation of sample sizes, locality (small projective path), high reproducibility, absence of problems with adhesion etc. [7][8][9][10][11][12][13][14][15]. In order to improve the properties of metals, alloys and ceramics, it is necessary to use high doses of ion implantation, from typically 5Á10 16 up to 5x10 17 cm À2 [16].…”

Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N+(1018cm-2)

“…In its turn, it causes a structural change, in that the crystal structure of the target can be damaged or even destroyed by the energetic collision cascades. As the masses of the implanted ions are comparable to those of the target atoms, the implanted ions knock the target atoms out of place even more than electron beams do [5][6][7][8][9][10][11][12][13][14][15][16][17][18]. The main advantage of ion implantation is preservation of sample sizes, locality (small projected range), high reproducibility, no problems with adhesion, etc., which allows using it in various technological processes.…”