Effect of overheat and direct flow loading on the MEMS bistable flow sensor

Litvinov, Ivan; Refaeli, Dan; Liberzon, Alex; Krylov, Slava

doi:10.1016/j.sna.2024.115312

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2024

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Cited by 2 publications

References 34 publications

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MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface

Sathish,

Ravikumar,

2024

Lecture Notes in Computer Science

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MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface

Sathish,

Ravikumar,

2024

Lecture Notes in Computer Science

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Piezoresistive snap-through detection for bifurcation-based MEMS sensors

Litvinov,

Spaer Milo,

Liberzon

et al. 2024

Applied Physics Letters

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We report on the piezoresistive method for detecting stability loss events in microelectromechanical sensors based on bifurcation. The method involves measuring the resistivity changes of an entire beam to detect snap-through transitions in an electrostatically actuated, bistable double-clamped crystalline silicon (Si) microbeam. The applicability of the suggested approach in two types of sensors—an ambient air temperature sensor or a mean air velocity sensor, is demonstrated. In both cases, the bistable beam, serving as the sensing element, is affected by the electrothermal Joule's heating and air cooling. The measured signal is obtained by monitoring the critical voltages of the snap-through transitions. Piezoresistive sensing is especially suitable for the response monitoring of the exposed to the environment, free-standing heated microbeam sensors, where optical, piezoelectric, or electrostatic interrogation methods are not applicable. The approach can be implemented in various bifurcation microsensors and for response monitoring of bistable actuators.

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Effect of overheat and direct flow loading on the MEMS bistable flow sensor

Cited by 2 publications

References 34 publications

MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface

MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface

Piezoresistive snap-through detection for bifurcation-based MEMS sensors

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