Effect of oxygen plasma treatment on the properties of ALD hafnium oxide films

Bulyarskiy, Sergey V.; Litvinova, Kristina I.; Rudakov, Grigory A.; Shibalova, Anastasia A.; Gusarov, Georgy G.

doi:10.1016/j.surfin.2024.105403

Surfaces and Interfaces

2024

DOI: 10.1016/j.surfin.2024.105403

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Effect of oxygen plasma treatment on the properties of ALD hafnium oxide films

Sergey V. Bulyarskiy,

Kristina I. Litvinova,

Grigory A. Rudakov

et al.

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Effect of oxygen plasma treatment on the properties of ALD hafnium oxide films

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References 25 publications

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