Effect of Pd content on crystallization and shape memory properties of Ti–Ni–Pd thin films

Kim, Hee-Young; Yang, Yuan; Nam, Tae-Hyun; Miyazaki, Shuichi

doi:10.1080/19475411.2010.550655

Cited by 10 publications

(2 citation statements)

References 41 publications

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“…Another benefit of the micro-system technology approach is that samples from different alloys can be fabricated and structured with almost identical process parameters, without the need of cold or hot work or forging which often lead to difficulties in the processing of brittle materials. Thus, beside extensive work on binary NiTi [13][14][15][16][17][18], sputtered films from NiTiCu [19][20][21][22], NiTiHf [23][24][25], NiTiPd [5,[26][27][28][29][30], and NiTiZr [23,31] have been investigated. Like NiTiCu bulk material, sputtered NiTiCu films reveal excellent functional stability during cyclic loading.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Freestanding NiTi Based Thin Film Materials for Shape Memory Micro-actuator Applications

Bechtold¹,

Chluba²,

Zamponi

et al. 2019

Shap. Mem. Superelasticity

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Thin film shape memory actuators fabricated by micro-system technology processes are of particular interest in micro-actuator applications due to their high work output, large displacements, and a comparably easy and compact system setup. Micro-system technology processes allow to deposit and structure ultra-precise parts from a wide range of alloys, among them alloys that are difficult to process with conventional fabrication techniques. However, sputtered NiTi based thin films are seldom deposited with thicknesses [ 10 lm, which limits their range of application as well as makes the handling of freestanding films difficult. In this work, freestanding NiTi, NiTiCu, and NiTiHf shape memory structures were fabricated by means of sputtering, lithography, and wet etching, with a process that allows for thicknesses up to 80 lm. Their high cycle actuation behavior and microstructure were characterized. NiTiCu actuators show an excellent cyclic stability, resulting in high fatigue lives of [ 10 8 cycles at 1.5% strain, even for stresses as high as 550 MPa. A distinct martensite/austenite interface is observed during transformation, in contrast to NiTi exhibiting a rather homogeneous transformation during heating and cooling throughout the sample volume. Sputtered NiTiHf actuators tested in air can reach fatigue lives as high as 1.5 9 10 6 cycles at 1% strain. Keywords NiTi Á NiTiHf Á Mechanical behavior Á Shape memory films Á Thermal cycling This article is an invited submission to Shape Memory and Superelasticity selected from presentations at the Shape Memory and Superelastic Technology Conference and Exposition (SMST2019) held May 13-17, 2019 at The Bodensee Forum in Konstanz, Germany, and has been expanded from the original presentation.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Freestanding NiTi Based Thin Film Materials for Shape Memory Micro-actuator Applications

Bechtold¹,

Chluba²,

Zamponi

et al. 2019

Shap. Mem. Superelasticity

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“…Many investigations have focused on adding various alloying elements to the binary system to increase the transformation temperatures. For example, the martensitic transformation temperature of TiNi alloys increases with the replacement of Ni with Pd or Pt [5] and the substitution of Hf or Zr for Ti [6]. However, their applications are limited because of the high cost of precious alloying elements for Ti-Ni-Pd and Ti-Ni-Pt alloys and the low ductility and poor cold-workability for Ti-Ni-Hf and Ti-Ni-Zr alloys [7].…”

Section: Introductionmentioning

confidence: 99%

Shape memory characteristics of highly porous Ti-rich TiNi alloys

Kim

2016

Materials Letters

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High‐Temperature Shape Memory Effect in Ti‐Ta Thin Films Sputter Deposited at Room Temperature

Motemani

Buenconsejo

Crăciunescu

et al. 2014

Adv Materials Inter

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Ti‐Ta based alloys are potential high‐temperature shape memory materials with operation temperatures above 100 °C. In this study, the room temperature fabrication of Ti‐Ta thin films showing a reversible martensitic transformation and a high temperature shape memory effect above 200 °C is reported. In contrast to other shape memory thin films, no further heat treatment is necessary to obtain the functional properties. A disordered α″ martensite (orthorhombic) phase is formed in the as‐deposited co‐sputtered Ti70Ta30, Ti68Ta32 and Ti67Ta33 films, independent of the substrate. A Ti70Ta30 free‐standing film shows a reversible martensitic transformation, as confirmed by temperature–dependent XRD measurements during thermal cycling between 125 °C to 275 °C. Furthermore, a one‐way shape memory effect is qualitatively confirmed in this film. The observed properties of the Ti‐Ta thin films make them promising for applications on polymer substrates and especially in microsystem technologies.

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Effect of Pd content on crystallization and shape memory properties of Ti–Ni–Pd thin films

Cited by 10 publications

References 41 publications

Fabrication and Characterization of Freestanding NiTi Based Thin Film Materials for Shape Memory Micro-actuator Applications

Fabrication and Characterization of Freestanding NiTi Based Thin Film Materials for Shape Memory Micro-actuator Applications

Shape memory characteristics of highly porous Ti-rich TiNi alloys

High‐Temperature Shape Memory Effect in Ti‐Ta Thin Films Sputter Deposited at Room Temperature

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