Effect of polishing roller structure on pressure distribution during the linear hydrodynamic polishing

Xie, Zhong; Xu, Yabo; Qi, Huan; Cai, Donghai; Wen, Desheng

doi:10.1007/s00170-021-07090-7

Cited by 1 publication

(1 citation statement)

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“…They observed that rolls with rectangular microstructures were capable of generating more uniform hydrodynamic pressure. Figure 7 illustrates that when the rectangular microstructure was identified, 12 rectangular rolls generated pronounced pressure, surpassing other roll types [89]. Treating the K9 glass workpiece with the optimal process parameters resulted in a noteworthy reduction in surface roughness (Ra) from 45.41 nm to 0.91 nm, showcasing the effectiveness of the linear hydrodynamic pressure ultra-smooth machining technique.…”

Section: Elastic Emission Machiningmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

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Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.

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Section: Elastic Emission Machiningmentioning

confidence: 99%