2015
DOI: 10.4028/www.scientific.net/amm.749.197
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Effect of Post Deposition Annealing Process on the pH Sensitivity of Spin-Coated Titanium Dioxide Thin Film

Abstract: This paper presents an investigation on titanium dioxide (TiO2) thin film, which is used as sensing membrane for Extended-Gate Field Effect Transistor (EGFET) for pH sensing application. TiO2 thin films were deposited using sol-gel spin coating method on indium tin oxide (ITO) substrates. After the deposition, the thin films were annealed at 300 °C for 10 and 15 min, while another sample was annealed at 400 °C for 15 min. The sensitivity measurement was taken using the EGFET setup equipment with constant-curre… Show more

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Cited by 4 publications
(1 citation statement)
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“…TiO 2 is a type of metal oxide material that has become an important engineering material due to the versatility of electrical and optical properties that have been used in various applications in many fields including dye-sensitized solar cell [1,2], photocatalysts [3], working electrodes in semiconductor [4], dielectric layers material [5,6], gas sensor [7], drug sensor [8], and also sensing membrane for pH detection [9][10][11][12]. TiO 2 is an interesting material due to its advantages such as good chemical and temperature stability, high permittivity and refractivity index, high dielectric constant, and biocompatibility.…”
Section: Introductionmentioning
confidence: 99%
“…TiO 2 is a type of metal oxide material that has become an important engineering material due to the versatility of electrical and optical properties that have been used in various applications in many fields including dye-sensitized solar cell [1,2], photocatalysts [3], working electrodes in semiconductor [4], dielectric layers material [5,6], gas sensor [7], drug sensor [8], and also sensing membrane for pH detection [9][10][11][12]. TiO 2 is an interesting material due to its advantages such as good chemical and temperature stability, high permittivity and refractivity index, high dielectric constant, and biocompatibility.…”
Section: Introductionmentioning
confidence: 99%