Effect of pre-annealing of lithium niobate on the structure and optical characteristics of proton-exchanged waveguides

Sosunov, A. V.; Ponomarev, Roman; Semenova, O. R.; Петухов, И. В.; Volyntsev, A. B.

doi:10.1016/j.optmat.2018.11.018

Cited by 14 publications

(8 citation statements)

References 21 publications

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“…EO-modulators were prepared from congruent LiNbO3 X-cut (manufactured by Crystal Technology Inc). One of the LiNbO3 wafers was pre-annealed (hereinafter referred to as treatment) at 500 °C for 3 hours and then cooled down slowly with furnace designed to treatment the structure of disturbed surface layer as described in [18]. This temperature is ideal for obtaining a more homogeneous structure of near-surface layer of a LiNbO3 crystal and HхLi1-хNbO3 optical waveguides.…”

Section: Sample Preparationmentioning

confidence: 99%

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Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Sosunov¹,

Ponomarev²,

Zhuravlev³

et al. 2021

Preprint

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This work involves results of research on short-term and long-term DC-drifts in electro-optical modulators based on annealed proton exchange waveguides in LiNbO3 crystals after wafer pre-annealing. The relaxation time of the DC-drift of the operating point for a short-term drift is minutes, and for a long-term drift, hours and days. DC-drift was measured by applying bias voltage and changing crystal temperature. Obtained results shows significant impact on stability of operating point in EO-modulators after treatment of defective structure of the near-surface layer of a LiNbO3 crystal. Treatment of the disturbed near-surface layer of a LiNbO3 crystal results in twice reduction of short-term DC-drift and increase of operation stability of electro-optical modulators during long-term measurement of temperature by activation energy calculation.

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Section: Sample Preparationmentioning

confidence: 99%

“…light diffusion paths represented by dislocation grids. Then we offered [18] an approach to treatment a disturbed near-surface layer of a LiNbO3 crystal to increase its structural homogeneity and stability of operating point in EO-modulators.…”

Section: Introductionmentioning

confidence: 99%

Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Sosunov¹,

Ponomarev²,

Zhuravlev³

et al. 2021

Preprint

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show abstract

“…In 1922, Laurell et al [16] proposed a new wet-etching method by using PE and a mixture of HF/HNO 3 acids for LiNbO 3 to overcome the drawbacks caused by a dry-etching process, and finally obtained a ridge waveguide with smooth etching surface. During the past 20 years, LN-based ridge waveguides and related optical devices fabricated by this method have been successfully developed [17][18][19][20][21][22]. Wang et al [23] used electric field-assisted proton exchange in the lateral directions and thus not only created a vertical sidewall near the substrate surface with smooth surface, but also effectively increased the vertical sidewall depth.…”

Section: Introductionmentioning

confidence: 99%

Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique

Liu¹,

Lan²,

Yang³

et al. 2020

Mater. Res. Express

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Lithium niobate material (LN) has shown great application potentials in the fabrication of integrated optical devices due to its excellent physical properties, especially with the occurrence of lithium niobate-on-insulator (LNOI) substrate. However, the greatest challenge of micro/nano optical devices based on LN material lies in the precise etching process and thus limits its applications. In this paper, we comprehensively analyze the etching results treated by the proposed proton-exchanged wet-etching method (PEWE) combining with theoretical simulations and experiments. It is found that the proton-exchanged layer in the LN material can be easily etched after using a mixture acid of HF/HNO 3 , leading to the improvement of etching rate and surface morphology. The lowest roughness of the optical waveguide is measured to be 0.81 nm, which is beneficial for the performance improvement of LN-based optical devices. Ultimately, a quasi-vertical sidewall of the upper part of optical waveguide with improved surface morphology is successfully realized by utilizing the PEWE. Moreover, this method could also be extended to improve the performance of LNOI-based optical devices and pave the way for ultra-compact photonic integrated circuits based on LNOI.

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“…The main advantages of using a lithium niobate crystal are its wide transmission window, high electro-optical coefficient r 33 and the relative simplicity of creating waveguides [3]. The disadvantages of the crystal include its complex structure and the variety of defects, as well as the difference in the composition, structure and properties of the near-surface layers on crystals of different manufacturers [4]. The waveguides of optical integrated circuits are formed by the ion exchange method.…”

Section: Introductionmentioning

confidence: 99%

“Shutdown” of the Proton Exchange Channel Waveguide in the Phase Modulator under the Influence of the Pyroelectric Effect

2019

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It is shown that the termination of the channeling of the fundamental radiation mode in the waveguide can be observed upon heating of an optical integrated circuit based on proton exchange channel waveguides formed in a lithium niobate single crystal. This process is reversible, but restoration of waveguide performance takes tens of minutes. The effect of the waveguide disappearance is observed upon rapid heating (5 K/min) from a low temperature (minus 40 °C). This effect can lead to a temporary failure of navigation systems using fiber optic gyroscopes with modulators based on a lithium niobate crystal.

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Effect of pre-annealing of lithium niobate on the structure and optical characteristics of proton-exchanged waveguides

Cited by 14 publications

References 21 publications

Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique

“Shutdown” of the Proton Exchange Channel Waveguide in the Phase Modulator under the Influence of the Pyroelectric Effect

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Effect of pre-annealing of lithium niobate on the structure and optical characteristics of proton-exchanged waveguides

Cited by 14 publications

References 21 publications

Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Reduction of DC-drift in LiNbO3-based Electro-optical Modulator

Research of selective etching in LiNbO3 using proton-exchanged wet etching technique

“Shutdown” of the Proton Exchange Channel Waveguide in the Phase Modulator under the Influence of the Pyroelectric Effect

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Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique