The paper studies the effect of laser processing on the structure and electrophysical properties of LaB 6 -based thick film resistors (TFR). The phases and structure of the composition are investigated. The exposure to micro-and nanosecond pulses, unlike millisecond ones, is shown to insignificantly increase the electrical resistance of the film and to aid in forming more uniform and fine TFR structure. LaB 6 -based TFRs are more resistant to long-term exposure to nanosecond laser radiation than BaB 6 -and (BaB 6 -LaB 6 )-based ones.