Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

Abstract

The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature stiffness control (Mode II) were analyzed. We obtained the main factors affecting the zero-rate output (ZRO) under force-to-rebalance (FTR) closed-loop detection. The analysis results showed that the circuit phase delay in Mode I caused the quadrature channel to leak into the in-phase channel. However, in Mode II, the quadrature coupling stiffness was corrected in real time, which effectively improved the stability of the ZRO. The changes in the vibration displacement and Q-factor were the main factors for the ZRO drift in Mode II. Therefore, we propose an online compensation method for ZRO drift based on multiparameter fusion. The experimental results on a cobweb-like disk resonator gyroscope (CDRG) with a 340 k Q-factor showed that the bias instability (BI) of Mode II was significantly better than that of Mode I. After online compensation, the BI reached 0.23°/h, and the bias repeatability reached 3.15°/h at room temperature.

Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

“…Previous studies [21,22] suggest that using the force-torebalance (FTR) closed-loop detection and quadrature stiffness control mode for the sense mode improves stability. Herein, the expressions for the bias and SF of the gyroscope are…”

“…Previous studies [21, 22] suggest that using the force‐to‐rebalance (FTR) closed‐loop detection and quadrature stiffness control mode for the sense mode improves stability. Herein, the expressions for the bias and SF of the gyroscope are $$$$\begin{equation}Bias \approx - \Delta \left( {1/\tau } \right)\sin 2{\theta }_\tau m{\omega }_x\left\| x \right\|\sin ({\varphi }_x)/{K}_{VF},\end{equation}$$$$ $$$$\begin{equation}SF = - 4m{A}_g{\omega }_x\left\| x \right\|\sin ({\varphi }_x)/{K}_{VF},\end{equation}$$$$where τ is the attenuation time constant $$\tau = 2Q/\omega $$, ω is the resonant frequency of the drive or sense mode, Q is the quality factor, m is the mass, $${\theta }_\tau $$ is the damping axis deflection angle, $$\| x \|$$ is the amplitude of vibrational displacement x , $${\varphi }_x$$ is the drive‐mode phase (after phase‐shift compensation, $${\varphi }_x \approx {90}^o$$), $${K}_{VF}$$is the conversion coefficient from voltage to driving force, $${K}_{XV}$$ is the conversion coefficient from vibrational displacement to voltage, and $${A}_g$$…”

Adaptive Fractional Prescribed Performance Control for Micro-Electromechanical System Gyros Using a Modified Neural Estimator

“…1+e −2ψ The parameters chosen in the sliding mode control are as follows: λ 1 = diag(10), λ 2 = diag(60), α = −0.65, γ = diag (5). For the neural estimator, the number of the hidden layer neurons is N = 20, the gyro tracking error is used as the original input signal and the constrained input mapping function is e con (t) = e 0.1e(t) −e −0.1e (t) e 0.1e(t) +e −0.1e(t) , while the initial values for the center and width of ignition functions are random values in [−0.1 0.1].…”

“…The proof mass will then be pulled to vibrate by the Colioris force along the axis perpendicular to the "drive axis" named the "sensing axis". Information relating to the applied angular velocity can be extracted by detecting the vibration amplitude of the proof mass in the sensing direction [5]. In practical MEMS gyro control methods, feedback-control techniques (especially adaptive gain control and phase-lock loop) are mostly adopted to control the vibration amplitude and the phase of the proof-mass trajectory [6].…”

A Temperature Drift Suppression Method of Mode-Matched MEMS Gyroscope Based on a Combination of Mode Reversal and Multiple Regression

“…The drift caused by the turn-on process of the gyroscope [ 37 , 38 , 39 , 40 ] is considered to be the result of parasitic charge accumulation and the rapid heating process after power-on. This process fits well with the situation described in Formula (6).…”