Effect of Refractive Solid Immersion Lens parameters on the enhancement of laser induced fault localization techniques

Goh, Siang-Huat; Quah, A.C.T.; Sheppard, Colin J. R.; Chua, C.M.; Koh, Lip Lin; Phang, J.C.H.

doi:10.1109/ipfa.2008.4588146

Cited by 4 publications

(1 citation statement)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…All of these above mentioned techniques are compatible with SIL imaging and could benefit from this. Evidence of which has been demonstrated by Goh et al [81] who successfully implemented a SIL into a Thermally Induced Voltage Alteration (TIVA) IC failure analysis scheme to obtain an enhancement in the TIVA signal of up to 12 times.…”

Section: Other Potential Applications Of Solid Immersion Lenses In Icmentioning

confidence: 97%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

View full text Add to dashboard Cite

Abstract. Solid immersion lens (SIL) microscopy combines the advantages of conventional microscopy with those of near-field techniques, and is being increasingly adopted across a diverse range of technologies and applications. A comprehensive overview of the state-of-the-art in this rapidly expanding subject is therefore increasingly relevant. Important benefits are enabled by SIL-focusing, including an improved lateral and axial spatial profiling resolution when a SIL is used in laser-scanning microscopy or excitation, and an improved collection efficiency when a SIL is used in a light-collection mode, for example in fluorescence micro-spectroscopy. These advantages arise from the increase in numerical aperture (NA) that is provided by a SIL. Other SIL-enhanced improvements, for example spherical-aberration-free sub-surface imaging, are a fundamental consequence of the aplanatic imaging condition that results from the spherical geometry of the SIL. The theory of SIL imaging exposes the unique properties of SILs that provide advantages in applications involving the interrogation of photonic and electronic nanostructures. Such applications range from the sub-surface examination of the complex three-dimensional microstructures fabricated in silicon integrated circuits, to quantum photoluminescence and transmission measurements in semiconductor quantum dot nanostructures.

show abstract

Section: Other Potential Applications Of Solid Immersion Lenses In Icmentioning

confidence: 97%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

View full text Add to dashboard Cite

show abstract

Building-in reliability and challenges in analysis in sub−100nm devices - An overview

Radhakrishnan¹

2009

2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits

View full text Add to dashboard Cite

Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

Phang

Goh

Quah

et al. 2009

2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits

View full text Add to dashboard Cite

Effect of Refractive Solid Immersion Lens parameters on the enhancement of laser induced fault localization techniques

Cited by 4 publications

References 10 publications

Solid immersion lens applications for nanophotonic devices

Solid immersion lens applications for nanophotonic devices

Building-in reliability and challenges in analysis in sub−100nm devices - An overview

Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

Contact Info

Product

Resources

About

Effect of Refractive Solid Immersion Lens parameters on the enhancement of laser induced fault localization techniques

Cited by 4 publications

References 10 publications

Solid immersion lens applications for nanophotonic devices

Solid immersion lens applications for nanophotonic devices

Building-in reliability and challenges in analysis in sub&#x2212;100nm devices - An overview

Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

Contact Info

Product

Resources

About

Building-in reliability and challenges in analysis in sub−100nm devices - An overview