The Sm-Fe thin lms were prepared by a DC magnetron sputtering system installed the Langmuir probe with various substrate bias voltage. In this work, internal stress of the Sm-Fe thin lms was investigated considering ion bombardment. The in uence of ion bombardment on internal stress in lms was estimated by the ion bombardment parameter (P i ). The P i increased with increasing negative substrate voltage. Internal stress of Sm-Fe thin lms showed a larger compressive stress with increasing amount of the P i . The magnetostrictive susceptibility of Sm-Fe thin lms was improved by increasing compressive stress. The magnetostrictive susceptibility of the Sm-Fe thin lm was dependent on the P i .