Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator

Kumar, Yoginder; Singh, Jitendra Kumar; Kumari, Gunjan; Singh, Ravindra; Akhtar, Jamil

doi:10.1063/1.4945165

Cited by 8 publications

(2 citation statements)

References 3 publications

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“…Based on the material presented in this paper, it is reasonable to expect the definition of merit (FoM) for a piezoelectricbased resonator to be proportional to both Q and the coupling factor. One standard definition for the resonator FoM is [24]:…”

Section: Measurement Of S21mentioning

confidence: 99%

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

Liu¹,

Wang²,

Le³

et al. 2018

J. Micromech. Microeng.

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A high quality factor (Q) piezoelectric double-ended tuning fork (DETF) resonator with dual-driving capacity based on aluminum nitride (AlN) is reported in this paper. This novel dual-driving electrode design in a piezoelectric resonator can not only enhance the symmetry in the in-plane mode but also weaken the crosstalk from the out-of-plane mode. By trapping the vibration energy in the wanted mode, the dual-driving DETF improves Q to 8173 compared to the conventional single-driving DETF with a Q of 3632. Through this dual-driving strategy, the DETF is excited to vibrate more closely with the in-plane resonant mode, which has less energy loss and balanced stress distribution. In addition, the dual-driving method also increases the signal intensity at the symmetric mode while reducing the signal intensity at the out-of-plane mode. This suppressed multimode effect contributes to a high performance of the DETF resonators and shows good potential in piezoelectric resonant sensors with high resolution.

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Section: Measurement Of S21mentioning

confidence: 99%

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

Liu¹,

Wang²,

Le³

et al. 2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…The most common practice for their suppression is apodization, where electrode side edges are shaped non-parallel. [8][9][10][11] Although various shapes were studied experimentally, 12,13) it is still unclear which shape is best for the transverse mode suppression with acceptable Q deterioration.…”

Section: Introductionmentioning

confidence: 99%

2D scalar wave modelling of apodized RF BAW resonators for transverse mode analysis

Wong

et al. 2023

Jpn. J. Appl. Phys.

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This paper proposes use of a two-dimensional (2D) scalar wave model for fast analysis of apodized AlN-based RF BAW devices. First, the working principle and model setup are introduced. Only one particular Lamb mode (S1-) is considered, and its behavior is modeled by a simple scalar wave equation looking from the top surface. A multiple layers are added to the side boundaries so that mode conversion to other modes is treated as leakage to surrounding. The wavenumber of field distribution for each resonance mode are calculated, and then its excitation coefficient, quality factor and resonance frequency are derived. The device input admittance is calculated by applying derived parameters to the equivalent circuit. A series of oval-shaped AlN-based FBAR devices are simulated and compared with experimental results. The theoretical results agreed well with the experimental ones, and accuracy and effectiveness of the present analysis are verified.

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Advanced Ultrasound Energy Transfer Technologies using Metamaterial Structures

Imani,

Kim,

Shin

et al. 2024

Advanced Science

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Wireless energy transfer (WET) based on ultrasound‐driven generators with enormous beneficial functions, is technologically in progress by the valuation of ultrasonic metamaterials (UMMs) in science and engineering domains. Indeed, novel metamaterial structures can develop the efficiency of mechanical and physical features of ultrasound energy receivers (US‐ETs), including ultrasound‐driven piezoelectric and triboelectric nanogenerators (US‐PENGs and US‐TENGs) for advantageous applications. This review article first summarizes the fundamentals, classification, and design engineering of UMMs after introducing ultrasound energy for WET technology. In addition to addressing using UMMs, the topical progress of innovative UMMs in US‐ETs is conceptually presented. Moreover, the advanced approaches of metamaterials are reported in the categorized applications of US‐PENGs and US‐TENGs. Finally, some current perspectives and encounters of UMMs in US‐ETs are offered. With this objective in mind, this review explores the potential revolution of reliable integrated energy transfer systems through the transformation of metamaterials into ultrasound‐driven active mediums for generators.

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Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator

Cited by 8 publications

References 3 publications

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

2D scalar wave modelling of apodized RF BAW resonators for transverse mode analysis

Advanced Ultrasound Energy Transfer Technologies using Metamaterial Structures

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