Effect of Si/Ta and nitrogen ratios on the thermal stability of Ta–Si–N thin films

Chung, Chen-Kuei; Chen, T. S.

doi:10.1016/j.mee.2009.06.026

Cited by 7 publications

(1 citation statement)

References 10 publications

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“…The introduction of Si 3 N 4 into the TaSi 2 coatings allows for a substantial increase in oxidation resistance [24]. The Ta-Si-N coatings have high thermal stability up to 900 • C [25]. Moreover, Ta-Si-N coatings possess good diffusion barrier properties [26] and are used to prolongate the lifespan of high-speed steel cutting tools [27] and glass forms [28].…”

Section: Introductionmentioning

confidence: 99%

Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

Kiryukhantsev-Korneev

Сытченко

Vorotilo

et al. 2020

Coatings

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Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi2-Ta3B4-(Ta,Zr)B2 ceramic target in the Ar medium and Ar-N2 and Ar-C2H4 gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al2O3 balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 °C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 °C thanks to the formation of a protective film based on Ta2O5 and SiO2 on their surface. Coatings deposited in Ar-N2 and Ar-C2H4 demonstrated superior resistance to thermal cycling in conditions 20-T−20 °C (where T = 200–1000 °C). The present article compares the structure and properties of reactive and “standard-inert atmosphere” deposited coatings to develop recommendations for optimizing the composition.

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