“…Furthermore, the electrical properties of poly-Si and GBs are additionally altered by the complex interaction with intrinsic point defects (vacancies and/or self-interstitials) and/or impurity atoms, such as carbon, oxygen, nitrogen, and various types of metals. 7,10,11 Moreover, the interaction of these light impurities (C, O, N) with poly-Si under certain circumstances can facilitate the formation of microstructures of SiC, SiO 2 , and Si 3 N 4 . 10 Oxygen defects in Si have been reported focusing on several aspects, such as doping concentration, different heteroatom complexes, and modification of electronic and mechanical properties.…”