2023
DOI: 10.1016/j.ceramint.2022.11.262
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Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings

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Cited by 4 publications
(1 citation statement)
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“…The film growth direction and the mobility of adatoms during sputtering are greater at lower rotational speeds due to the almost perpendicular position of sputtered ions to the film growth surface, resulting in a dense microstructure. At higher speeds, the angle of growth of the coating structure predominantly varies, reducing the energy of sputtering ions [78]. Wang et al [79] investigated the effect of reactive N2 partial pressure on TiBN/TiAlSiN nano-multilayered coatings fabricated by the cathodic arc technique.…”
Section: Significance Of the Structural And Mechanical Properties Of ...mentioning
confidence: 99%
“…The film growth direction and the mobility of adatoms during sputtering are greater at lower rotational speeds due to the almost perpendicular position of sputtered ions to the film growth surface, resulting in a dense microstructure. At higher speeds, the angle of growth of the coating structure predominantly varies, reducing the energy of sputtering ions [78]. Wang et al [79] investigated the effect of reactive N2 partial pressure on TiBN/TiAlSiN nano-multilayered coatings fabricated by the cathodic arc technique.…”
Section: Significance Of the Structural And Mechanical Properties Of ...mentioning
confidence: 99%